INSTRUMENT MANUAL
VACUUM GAUGE MODEL MM200
160Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:sales@televac.com web site:www.televac.com
MM-200_im REV M
Page 8 of 160
SECTION TITLE PAGE
700 CALIBRATION 128
701 ELECTRICAL "VERIFICATION" 128
Equipment Required 128
Procedure 129
702 VACUUM CALIBRATION 129
Equipment Required 130
Procedure 131
703 CALIBRATION FOR ALTERNATE GASSES 133
800 SPECIFICATIONS 134.
801 CONTROLLER SPECIFICATIONS 134
802 CONTROLLER DIMENSIONS 134
803 SENSORS 135
804 ORDERING INFORMATION 135
900 TROUBLESHOOTING 137
901 PRELIMINARY TROUBLESHOOTING 137
902 SETUP OF MODULE BOARDS 138
Setpoint relay module 138
Digital interface module 140
Thermocouple module 141
Convection module 143
Cold Cathode module 145
Diaphragm modules 149
Capacitance Diaphragm module 151
3D Hot Cathode module 153
3E Hot Cathode module 154
903 DRAWINGS AND SCHEMATICS 155
904 CLEANING COLD CATHODE GAUGE TUBES 156
905 SUPPRESSOR INSTALLATION FOR NOISY ENVIRONMENTS 157
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