INTRODUCTION
The TS-6000 series
The TS-6000 series is a line of horizontal furnaces for up to 150 mm. (6 inch) wafers. This
system is standard equipped with an accurate 3 zone digital controller for optimum
temperature control.
In this line the following models are available:
• TS-6300 series: Designed for 150 mm R&D institutes. With its flatzone of 30 cm,
loads of 25 to 50 wafers can be processed.
• TS-6600 series: Designed for small batch or pilot production, 150 mm facilities.
With its flatzone of 60 cm, loads of 50 to 100 wafers can be
processed.
• TS-6800 series: Designed for 150 mm production facilities. With its flatzone of 80
cm, loads of 100 to 200 wafers can be processed.
• TS-61000 series: Designed for high volume, 150 mm production facilities. With its
flatzone of 100 cm, loads of 150 to 300 wafers can be processed.
The TS-8000 series
The TS-8000 series is a line of horizontal furnaces for up to 200 mm. (8 inch) wafers. These
systems are equipped with an accurate 5 zone digital controller for optimum temperature
control.
In this line the following models are available:
•
TS-8600 series: Designed for small batch or pilot production, 200 mm facilities.
With its flatzone of 60 cm, loads of 50 to 100 wafers can be
processed
• TS-81000 series: Designed for high volume production, 200 mm facilities. With its
flatzone of 100 cm, loads of 100 to 200 wafers can be processed.
The TS-12800 series
The TS-12800 series is a line of horizontal furnaces for up to 300 mm. (12 inch) wafers.
These systems are equipped with an accurate 5 zone digital controller for optimum
temperature control.
In this line the following models is available:
•
TS-12800 series: Designed for high volume production, 300 mm facilities. With its
flatzone of 80 cm, loads of 100 to 150 wafers can be processed.
FURNACE REFERENCE MANUAL
1-2
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