Ulvac G-20DA - Page 10

Contents‐3
DRAWING AND TABLE LIST
Fig- 1 General Assembly Drawing of G-20DA ・・・・・・・・・ 4
Fig- 2 General Assembly Drawing of G-25SA ・・
・・・・・・・ 4
Fig- 3 General Assembly Drawing of G-50DA･50SA ・・・
・・・・・・ 5
Fig- 4 Oil Charge to Rotary Vacuum Pump ・・・・・
・・・・ 7
Fig- 5 Vacuum Pumping System Diagram
・・・・・・・・・ 8
Fig- 6 Change region of the voltage and frequency ・・
・・・・・・・10
Fig- 7 Characteristics of Vacuum pumping speed ・
・・・・・・・・16
Fig- 8 Characteristics of Motor power ・・・
・・・・・・16
Fig- 9 Replacement of Spider in Coupling ・・・・・
・・・・21
Fig-10 Disassembly Drawing of G-20DA･50DA ・・
・・・・・・・26
Fig-11 Disassembly Drawing of G-25SA ・・・・
・・・・・27
Fig-12 Disassembly Drawing of G-50SA
・・・・・・・・・28
Table-1 Specification ・・・・・・・・・ 3
Table-2 Scheduled Inspection ・・・・
・・・・・18
Table-3 Trouble Check List ・・・・・・
・・・22
Table-4 Main Expendable Parts List ・
・・・・・・・・25
Attached table: Material Safety Data Sheet for Vacuum Pump Oil SMR-100