Ulvac G-20DA - Table of Contents

Contents‐1
CONTENTS
0.Preface ・・・・・・・・・01
0.1 Before Using This Pump ・・・・・・・・・01
0.2 Safety Precautions (General Expression) ・・・・・・・・・02
0.3 Safety Precautions ・・・・・・・・・03
0.4 Acceptance and Store of Product ・・・・・・・・・05
0.4.1 Acceptance of Product ・・・・・・・・・05
0.4.2 Store of Product, Installation, Operating condition
・・・・・・・・05
0.5 Protective Precautions ・・・・・・・・・06
1.For Safety Operation ・・・・・・・・・ 1
1.1 Hazardous of Product and Safety Precautions ・・・・・・・・・ 1
1.1.1 DANGER Leakage of hazardous gases and materials ・・・・・・・・・ 1
1.1.2 WARNING Electric shock
・・・・・・・・・ 1
1.1.3 WARNING Explosion
・・・・・・・・・ 2
1.1.4 CAUTION High Temperature
・・・・・・・・・ 2
1.2 Material Safety Data Sheet(MSDS) ・・・・・・・・・ 2
2. General Description of the Pump ・・・・・・・・・ 3
2.1 Principal Features ・・・・・・・・・ 3
2.2 Dimensional Drawings(G-20DA,25SA,50DA,50SA) ・・・
・・・・・・ 4
3. Setting up ・・・・・・・・・ 6
3.1 Installation ・・・・・・・・・ 6
3.2 Oil charging ・・
・・・・・・・ 6
3.3 Vacuum Tubing ・・
・・・・・・・ 8
3.4 Electric wiring ・・
・・・・・・・ 9
3.5 Fluctuations in the power voltage and frequency ・・
・・・・・・・10