‐2‐
1.1.3 Explosion
Cause
Preventive Procedure
Pump explosion is consequence of
excessive pressure inside the pump.
⇒
The maximum pressure inside the pump is 0.03
MPa (GAUGE).
If inlet pressure of the pump is higher than
0.03 MPa (GAUGE), eliminate any objects which
may cause obstruct gas flowing to the inlet
port. When using oil mist trap, exchange or
clean them to avoid gas flowing.
1.1.4 High Temperature
Cause
Preventive Procedure
① Temperature of the pump is high as shown
below
pump body → 70 ～ 80 ℃
motor → 70 ～ 80 ℃
Burn at high temperature.
⇒
②
High temperature surface of the pump may
cause to burn as a result of direct skin
contact by accident. Do not touch the pump
body during operation. Inspection should be
carried out after stopping and cooling down
the pump.
1.2 Material Safety Data Sheet (MSDS)
The chemical material, which is applied or possible to contact when operating this pump are
described. Read this manual carefully to understand characteristics of the chemical material
(vacuum pump oil) which is described on MSDS sheet. When applying other vacuum pump oils besides
the description in this manual, contact your local ULVAC KIKO,Inc. Sales and Service Center.
MSDS presents the reference information of hazardous chemical material to keep
safety precautions. When handling the pump oil, it is necessary to take proper
and practical treatments, which are adapted handling the oil. After understanding
the above mention, these treatments must be done. Therefore, MSDS is a not safety
warranty.
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