- 01 -
０．Preface
0.1 Before Using This Pump
We, ULVAC KIKO,Inc. thank you for purchasing our vacuum pump. When receiving our vacuum pump,
please confirm the product is the same Model No. as you ordered. Also, check to make sure there
are no damages.
To ensure a long life for this pump, read this manual carefully prior to
installation, operation, and maintenance. Also, pay attention to ascertain the
details of safety, specification, and operational precautions of this pump.
Copyright by ULVAC KIKO,Inc. All right reserved. All material in this manual shall
not be copied without permission by ULVAC KIKO,Inc. Printed in JAPAN.
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