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Ulvac G-20DA - Page 23

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13
4.3 Shut down Operation
Close shut off valve (A), open pump vent valve (B), then turn off power switch of the pump(see
Fig-5). If stopping the pump by no opening pump vent valve, the oil will be filled inside the
pump cylinder within several minutes. This may cause back flowing oil to the vacuum vessel.
For next operation, restarting the pump will be difficult because of not so smooth rotation,
thermal protector operating, motor firing by over loading.
When stopping the pump operation by electric stoppage, close shut off valve (A) quickly and
then open pump vent valve (B).
Firing hazard. As the surface of the pump body is higher temperature(70 ~8
C) during operation, do not touch it until cooled down after stopping the pump.
4.4 Oil shut off valve
Oil shut off valve is built in G-50SA. It is very effective to prevent back flowing oil from
the pump. This valve is provided for emergency as electric stoppage. For normal case, operate
4.3 Shut down Operation」.
After closing shut off valve (A) and opening pump vent valve (B), stop the
pump. If this procedure is not performed, pump oil must be filled inside the
pump. It may cause difficulty on restarting or damage the pump, also back
flowing oil to the vacuum vessel.
If the shut off valve (A) is not closed for shut down operation, this may cause
air leakage through inside the pump to the vacuum vessel.

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