Ulvac G-20DA - Page 28

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Table-2 Scheduled Inspection
Inspect cycle Inspect Item Inspect content Action item
Specified oil level Recharge oil
Oil quantity
Oil contamination
Reddish brown or milky
white→abnormal
Black→not abnormal
Change oil
Sound & Vibration
Unusual sound & Unusual
vibration
Tighten bolts/nuts or
Contact your local
Representative
Every 3 days
Motor current Specified rating
Confirm over current
source or Contact your
local Representative
Surface temperature
rising
>45℃ UP →abnormal
Confirm over heat
source or Contact your
local Representative
Weekly
Oil leak
Oil leak from seals or
plugs
Change seals, O-rings
or Contact your local
Representative
Mesh filter, inlet
port
Dust clogging Clean the mesh filter
Every 3000hr or
Every half year
Pump oil Inspect oil certainly Change oil
Every year Spider Broken spider Change spider
(2) Inspecting the pump oil quantity
Recharge the specified pump oil as oil level is always in the range (red circle marking)
of oil gauge during operating.
(3) Inspecting the pump oil leakage
When happening the oil leakage from shaft seals or drain-plug seals, repair must be needed.
As our service center provides the specified O-rings or seals, please contact your local
ULVAC KIKO, Inc. service center.
(4) Inspecting the mesh filter in the inlet port
Any dust included in evacuated gases may cause clog the mesh filter and down pumping
efficiency.
(5) Inspecting the abnormal noise or vibration
Check up any loose screws and nuts.