ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～
If the coil wiring is different, the beam may be radiated to an unexpected place, the coil may
be damaged, or the Gun controller may be damaged. Especially when the X-axis magnet coil
and COM are connected in reverse, not only the beam movement in the Y-axis direction
becomes abnormal, but also the beam is radiated to the chamber, which may damage the
chamber. Therefore, pay close attention to the wiring.
8) Various interface connectors check
Check whether the INTELOCKS connector and the PROGRAM connector are securely
connected and whether the connections of the connectors are correctly made. (See Figs. 4.7 and
4.8)
Each interlock is provided to ensure human safety and prevent damage to the EB gun.
Therefore be sure to avoid any wiring which may short-circuit the interlocks and operation with
the interlocks short-circuited because they are dangerous.
9) Check the EB gun
In reference to the operations manual of the EB gun, check the loading side.
Make sure that the crucible of the EB gun is filled with evaporative material and that the EB gun
is filled with more than the specified amount of cooling water.
Following the checking items described in the operations manual of the EB gun, check the
loading side. Do not switch the power supply to ON without checking the loading side.
Otherwise the EB gun may be damaged.
Be sure to satisfy the specification for the amount of the cooling water of the EB gun.
10) Power supply settings check
Check that each setting in the front of the Gun controller is set to the LOCAL mode.
For the settings, refer to Section 5.2.
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