Ulvac HPS-1600F - Page 71

ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～
7. Troubleshooting
62
Table 7.3: Beam Current Troubleshooting List
No.
Symptom
Possible cause
Possible check point
1
No beam current
passes.
A: No high voltage is applied.
Check that a high voltage is applied.
B: DEGAS mode
Confirm the DEGAS indicator.
If it is in the DEGAS mode, release it.
C: Blowout of filament
In reference to the operations manual of the EB gun,
check the emitter assembly.
D: Cable is disconnected.
Check the wiring of the filament line.
E: Trouble on loading side
Poor insulation or poor contact of the filament line due to
assembly failure of the EB gun, dirt on the isolation
insulator, etc.
F: Breakdown of power
supply
Contact us.
2
When turning the
EMISSION knob,
fuses F14 and
F15 or F24 and
F25 are blown.
A: Short circuit of filament line
of emitter assembly
In reference to the operations manual of the EB gun,
check the emitter assembly.
B: Breakdown of the power
supply
Contact us.
3
When the high
voltage is
switched to ON,
the emission
passes.
A: Command signal is
coming.
Check that the local control box command and the
external command signal are 0.
B: Glow discharge occurs.
Check whether a glow discharge occurs in the vacuum
chamber.
Check that the pressure is 5 x 10
-3
Pa or less.
C: Unusual electrical
discharge occurs.
Check whether the OVERLOAD indicator is blinking.
If the unusual electrical discharge is not reduced, do the
maintenance in the vacuum chamber, such as cleaning..
D: Breakdown of the power
supply
Contact us.
4
It does not reach
up to the rated
current.
A: MAX POWER is set.
Check whether MAX POWER is set.
B: Beam current is saturated
due to low high-voltage.
Check whether the high voltage is set to -10 kV.
The beam current extraction efficiency varies depending
on the high voltage settings and therefore the rated
current does not pass.
A rough guideline of the high voltage settings and the
maximum beam current value is shown below.
-10 kV：1600 mA
-8 kV ：1340 mA
-6 kV ：870 mA
- 4 kV ：470 mA
C: Poor contact of filament
line
Check whether poor contact occurs in the emitter
assembly and the high voltage introduction terminal of
the EB gun.
B: Assembly failure of emitter
assembly
In reference to the operations manual of the EB gun,
check the electrode size of the emitter assembly.
E: Filament lead wire
becomes thinner.
Check the filament lead wire.
Replace it when the thickness becomes approx. 80% of
new one.
F: Breakdown of the power
supply
Contact us.
5
When the beam
current passes,
OVERLOAD
lights up.
A: Dirt on isolation insulator
Check the isolation insulator of the emitter assembly or
the high voltage introduction terminal.
Replace with new one if there is extreme dirt.