Ulvac HPS-1600F - Page 72

ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～
7. Troubleshooting
63
Table 7.4: Magnet Troubleshooting List
No.
Symptom
Possible cause
Possible check point
1
The GUN
MAGNET
indicator does not
light up.
A: A settings error of MAG-
INTLK.
Check the MAG-INTLK settings.
Confirm the setting method of MAG-INTLK in Section
5.2 and set it again.
B: Break in or ground fault of
magnet coil wires
Check the wiring of the magnet coil.
Recover the point of a wire break or ground fault if any.
C: Break in X-axis magnet
coil
Check the resistance value of the X-axis magnet coil.
For the resistance value, refer to the instructions
manual of the EB gun.
D: Contaminated insulator of
X-axis magnet coil terminal
Check the X-axis magnet coil.
If the insulator is in a conductive state due to film
deposition, replace it.
E: Dirt on magnet lead wire
Check the magnet lead wire in the vacuum chamber.
Replace with new one if there is extreme deposited film
on the cable.
F: X-MIN setting error
Confirm the X-MIN settings.
If the X-axis magnet current is 0 A due to an X-MIN
setting error, the GUN MAGNET indicator does not light
up.
2
When changing
the magnet
current, the GUN
MAGNET
indicator is turned
off.
A: A settings error of MAG-
INTLK.
Check the MAG-INTLK settings.
Check how to set MAG-INTLK in Section 5.2 and set
them again.
3
The beam does
not hit inside the
crucible.
A: Magnet coil wiring error
In reference to the instructions manual of the EB gun,
check the wiring of the magnet coil.
B: X-MIN and X-MAX setting
errors
Confirm the X-MIN and X-MAX settings.
Confirm the setting method of X-MIN and X-MAX in
Section 5.2 and set them again.
C: Assembly failure of the
magnetic pole of the EB
gun
In reference to the operations manual of the EB gun,
check the magnetic pole of the EB gun and the
mounting state of the trim pieces.
E: Gun controller setting error
In reference to Table 2.1, confirm whether the EB gun
type matches the corresponding Gun controller.
4
The Y-axis
magnet coil
current flows, but
the beam does
not move in the Y-
axis direction.
A: Y-axis magnet coil wiring
error
In reference to the instructions manual of the EB gun,
check the wiring of the Y-axis magnet coil.
B: Short-circuit in magnet coil
wires
Check the wiring of the magnet coil.
Recover the point of ground fault if any.
5
The beam moves
diagonally.
A: Magnet coil wiring error
In reference to the instructions manual of the EB gun,
check the wiring of the coil.
6
The beam
position moves
during vapor
deposition.
A: Charging up of evaporation
material
Charging up of evaporation material
Clean the crucible and replace the material.
B: Insufficient cooling of X-
axis coil
Magnetic-field reduction due to a coil temperature rise
Check the flow rate of cooling water and the assembly
progress of the gun.
* Even if it is in a normal state, the beam position may
move slightly due to a temperature rise of the magnetic
poles or for other reason during long vapor deposition.