Ulvac ULK-04A - Page 16

SK00-4802-DI-002-04
No.16.10.20
Contents-2
4.2 Operation start ..................................................................................................................... 24
4.3 Operation stop ..................................................................................................................... 26
5. How to Handle Thermostat (Option) .............................................................................. 27
6. Maintenance/ Inspection ................................................................................................ 28
6.1 Maintenance ........................................................................................................................ 28
6.2 Periodical Inspection ............................................................................................................ 28
6.2.1. Oil level ........................................................................................................................................................................................ 29
6.2.2. Inspection of vacuum pump oil ........................................................................................................................................... 29
6.2.3. Oil replacement ......................................................................................................................................................................... 29
6.2.4 Disassembling of pump ............................................................................................................................................................ 33
6.2.5 Cleaning of pump ....................................................................................................................................................................... 38
6.2.6 Assembling of nozzle ............................................................................................................................................................... 38
6.2.7 Attachment of pump in the line ........................................................................................................................................... 39
6.2.8 Removal of heater ..................................................................................................................................................................... 39
6.2.9 Attachment of new heater .................................................................................................................................................... 42
6.3 Inspection after storage for long period of time ..................................................................... 43
6.4 Overhaul .............................................................................................................................. 43
6.5 Trouble check list ................................................................................................................. 44
7. Disposal ......................................................................................................................... 47
8 Warranty Clauses ........................................................................................................... 48
8.1 Warrantable Items ................................................................................................................ 48
8.2 Duration of guarantee .......................................................................................................... 48
8.3 Warrantee scope .................................................................................................................. 48
8.4 Response procedure ............................................................................................................ 49
8.5 Disclaimer ............................................................................................................................ 49
9 Main Replacement Parts ................................................................................................. 50
Pollution certificate
Sales, Service Department, and their contact information