SK00-4802-DI-002-04
No.16.10.20
Contents-3
Drawing List
Figure 1: Part name of ULK type oil diffusion pump .................................................................................. 6
Figure 2: Oil diffusion vacuum pump Model No.ULK-04A, Dimensional appearance drawings ............ 9
Figure 3: Oil diffusion vacuum pump Model No. ULK-06A, Dimensional appearance drawings ......... 10
Figure 4: Oil diffusion vacuum pump Model No. ULK-10A, Dimensional appearance drawings .......... 11
Figure 5: Oil diffusion vacuum pump Model No. ULK-14A, Dimensional appearance drawings ......... 12
Figure 6: Connection of outside lines to terminal box for ULK-04A/ULK-06A ......................................... 20
Figure 7: Connection of outside lines to terminal box for ULK-10A/ULK-14A ......................................... 20
Figure 8: Example of thermostat connection circuit ................................................................................. 27
Figure 9: Oil replacement instruction diagram ......................................................................................... 31
Figure 10: Nozzle pull-out instruction diagram for ULK-04A, ULK-06A................................................... 34
Figure 11: Exploded diagram of nozzle for ULK-04A, ULK-06A .............................................................. 34
Figure 12: Exploded diagram of nozzle for ULK-10A, ULK-14A ............................................................. 36
Figure 13: Exploded diagram of 1st steam cylinder for ULK-10A, ULK-14A ........................................... 37
Figure 14: Diagram on removal of heater of ULK-04A, ULK-06A ........................................................... 40
Figure 15: Wiring diagram in terminal box for ULK-04A, ULK-06A ......................................................... 41
Figure 16: Removal of heater of ULK-10A, ULK-14A .............................................................................. 41
Table 1: Performance specifications .......................................................................................................... 7
Table 2: Oil diffusion vacuum pump: Current value of ULK series .......................................................... 18
Table 3: Trouble check list ........................................................................................................................ 44
Table 4: List of main replacement parts ................................................................................................... 50
Graph 1: Pumping curve for ULK-04A/ULK-06A ....................................................................................... 8
Graph 2: Pumping curve for ULK-10A/ULK-14A ....................................................................................... 8
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