67
Angular Ion Beam Current Density Profiles
FIGURE B.3 and FIGURE B.4 show exemplary ion beam
current density
profiles for the original source d
esign as taken by a Faraday cup that was
angularly swept at a fixed distance of R=30cm from the ion source face.
Source profiles for argon and oxygen are shown for an anode current of
7.5A and at various anode potentials. Ion beam current density readings
at angles of ± 90° are nominally zero.
FIGURE B.3 Angular Beam
Current Density at R=30cm
and Anode Current=7.5A
(Argon).
Angular Ion Beam Current Density Profile at R=30 cm
(Argon with Anode Current of 7.5A)
0
0.2
0.4
0.6
0.8
1
1.2
-90 -80 -70 -60 -50 -40 -30 -20 -10 0 10 20 30 40 50 60 70 80 90
Angle (degrees)
Beam Current Density (mA/cm
2
)
100V
200V
300V
FIGURE B.4 Angular Beam
Current Density at R=30cm
and Anode Current=7.5A
(Oxygen).
Angular Ion Beam Current Density Profile at R=30 cm
(Oxygen with Anode Current of 7.5A)
0
0.2
0.4
0.6
0.8
1
1.2
-90 -80 -70 -60 -50 -40 -30 -20 -10 0 10 20 30 40 50 60 70 80 90
Angle (degrees)
Beam Current Density (mA/cm
2
)
100V
200V
300V
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