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Zeiss 200-mm airlock User Manual

Zeiss 200-mm airlock
32 pages
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200-mm airlock
Optional airlock for field emission
scanning electron microscopes
Instruction Manual
Carl Zeiss Microscopy - Electron and Ion Beam Microscopy
Enabling the Nano-Age World
®
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Zeiss 200-mm airlock Specifications

General IconGeneral
BrandZeiss
Model200-mm airlock
CategoryLaboratory Equipment
LanguageEnglish

Summary

About This Manual

Safety Instructions Overview

Defines classification of safety instructions and symbols used in the manual.

Typographical Conventions

Explains typographical conventions used for software and text.

Key Terms and Definitions

Provides definitions for key terms used in the instruction manual.

Safety Summary

Intended Use

Lists compatible ZEISS FESEM models and the purpose of the airlock.

Accident Prevention and Improper Use

Warns about risks of injury and property damage from improper operation or maintenance.

Safety Devices and Indicators

Describes safety features like interlocks and error LED.

System Description

Airlock Overview

Provides an overview and labels of the airlock components.

Control Panel Functions

Explains the function of push buttons and LEDs on the control panel.

Technical Specifications

Lists environmental requirements and electrical specifications.

Principle of Operation

Explains how the 200-mm airlock works to transfer specimens.

Customer Service Information

Provides contact information for customer service and support.

Installation Information

Operating Procedures

Specimen Exchange Using Airlock Macros

Details the procedure for specimen exchange using pre-defined airlock macros.

Manual Specimen Exchange

Describes the manual procedure for specimen exchange.

Storing Specimens in Airlock

Explains how to put a specimen into store mode within the airlock.

Removing the Airlock Rod

Details the steps to remove the airlock rod from the airlock.

Mounting the Airlock Rod

Details the steps to mount the airlock rod back into the airlock.

Maintenance and Repair

Troubleshooting Guide

Lists common issues, their causes, and recommended solutions.

Cleaning the Airlock

Provides instructions and parts required for cleaning the airlock.

Lubricating the Airlock Rod

Explains how to lubricate the airlock rod and lists required parts.

Spare Parts List

Lists spare parts and their corresponding part numbers.

De-installation and Disposal

Directives and Standards

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