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MultiSEM 505 Series
Zeiss MultiSEM 505 Series User Manual
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Instruction Manual
ZEISS MultiSEM 505/506 Series
Scanning Electron Microscope
2
Table of Contents
Table of Contents
5
About this Instruction Manual
11
Introduction
11
Conventions in this Document
12
Safety
17
Intended Use
17
General Information
17
Safety Procedures
18
Safe Operation Conditions
18
Requirements for Personnel
19
Preventive Maintenance
20
Safe Handling of Spare Parts
20
Prevention of Hazards
21
Burn Hazards
21
Chemical Hazards
21
Electrical Hazards
22
Mechanical Hazards
23
High Pressure Hazards
25
Radiation Hazards
25
Suffocation Hazards
26
Safety Equipment
26
Safety Devices
26
Protective Cover Panels
26
Interlock System
27
Main Switch
27
EMO Button
28
POWER on Button (EMO Function)
28
Main Shut-Off Valves
29
Safety Labels and Labels
29
At the Microscope Cabinet
30
At the Power Supply Rack
32
At the Image Acquisition Rack
34
Inside the Microscope Cabinet
35
Material Safety Data Sheets
35
Safety Information for Operation with the Cabinet Removed
35
Device Description
41
Introduction
41
About ZEISS Multisem
41
Main Hardware Components
43
ZEISS Multisem Microscope Cabinet
44
Specimen Chamber
47
Airlock
50
Plasma Cleaner
51
Specimen Stage
51
Specimen Holder
55
Chamber CCD Camera
57
Detection CCD Camera
59
Workstation
60
Control Panel
61
Dual Joystick Panel
64
Power Supply Rack
66
Image Acquisition Rack
67
Vacuum System
69
Overview of Auxiliary Supply Systems
72
Integration into Laboratory Environment
73
Software Overview
77
Introduction
77
Screen Layout
77
Basic Software Functions
78
Workspace Configuration Area
78
Adjusting the Tool Windows
79
Show or Hide Areas
80
Controls
80
Adding Meta Information to an Image
83
Saving an Image
84
User Management
85
Access Rights of Super Users
86
Message List
86
Starting the Software
87
Closing the Software
88
Principle of Operation
91
Introduction
91
Functional Principle (Overview)
91
Illumination and Detection Optics
92
Components in the Illumination Column
93
Beam Splitter, Scan Deflector, and Objective Lens
94
Components in the Detection Column
96
Applied Voltages
98
Source of the Detection Signal
100
Overview of Coordinate Systems
102
Powering Down/Up the Microscope
109
Introduction
109
Handling the High Voltage
109
STANDBY Mode and off Mode
110
Powering down the Microscope
111
Powering up the Microscope
111
Emergency off (EMO)
112
Switching off the Microscope in an Emergency
112
Switching the Microscope on after an Emergency off
113
Handling of the Specimen
117
Requirements for the Specimen
117
Mounting of the Specimen
117
Using the Plasma Cleaners
119
Alignment
125
Introduction
125
Purpose of Alignment
125
Auto Tuning Routines
126
Single Routines
128
Manual Operation
129
Moving the Stage
129
Detector Equalization
131
Purpose of Detector Equalization
131
Single Beam Contrast
132
Purpose of Single Beam Contrast
132
Adjustment of Scan Rotation
132
Scan Rotation
132
Specimen Registration
137
Introduction
137
Loading and Unloading the Specimen Chamber
137
Unloading the Specimen Chamber
137
Loading the Specimen Chamber
141
Pre-Adjustment
144
Pre-Adjustment Via Chamber CCD Camera
144
Vertical Adjustment of the Specimen Stage
146
Vertical Adjustment Via the Detection CCD Camera
146
Working Distance
147
Troubleshooting
151
Maintenance, Shutdown, and Disposal
157
Introduction
157
General Maintenance Information
157
Basic Preventive Maintenance
157
Column Bakeout
158
Shutdown
158
Disposal
158
Disposing of Consumables
158
Disposing of the Microscope
159
Support
159
Technical Data
163
Declaration of Conformity
163
Warranty
164
Technical Data
164
Index
167
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Zeiss MultiSEM 505 Series Specifications
General
Brand
Zeiss
Model
MultiSEM 505 Series
Category
Medical Equipment
Language
English
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