ADT 7100 - Page 35

ADT 7100 User Manual Troubleshooting
believe your blade life is still enough to finish the dicing process, you can
continue cutting. You will be allowed to click Accept to resume cutting. When in
doubt, stop and create a helpdesk ticket to consult with the tool engineer.
7. The maximum allowable RPM for the selected blade is less than spindle speed.
a. The spindle speed in the current recipe is greater than the maximum RPM that the
blade on the tool is allowed to rotate. This typically occurs because the wrong
recipe is loaded.
b. Load your recipe using Define Job before putting the blade on the tool.
c. Ensure that the correct blade and spindle speed is specified in your recipe.
8. The mounted blade does not fit the process program.
a. The blade specified in the current recipe is not the same as the blade on the
spindle.
b. Change the blade or your recipe as needed. Then, put the correct blade on the
spindle.
9. Warning blade exposure has been reached, or Blade finished: not enough exposure to
continue cutting.
a. Change the blade or use a smaller flange, if applicable.
10. Axis is not initialized yet.
a. The system may need to be initialized—Select System Init from the User menu.
11. During Non-Contact Height blade check error message “Axis position exceeds the limit.”
appears.
a. There is no blade on the tool, or it is badly broken. Change the blade.
12. Non Contact light calibration failed.
a. Blade measurement could not be performed because of this error. Retry or create a
helpdesk ticket
Lurie Nanofabrication Facility 4-3