Module 8
Capacitance Measurement
8-8
1
2
3 4
5
6
7
8
9
10
11
12
13
14 15
16
17
18
20
19
21
22
23
24
25
27
26
28
14
15
28
1
F
G
3
F
G
4
F
G
5
F
G
6
F
G
2
F
G
1
SMU
2
1
VMU
2
1
VSU
F
S
GNDU
F
2
F
1
PGU
1: Substrate
2: Source
3: Gate
4: Drain
G
S
D
Sub
CMUL
CMUH
Jumper Leads – MOS transistor
For all class exercises, you need the 28-pin dual in line socket which comes standard with the 4145
fixture (16058A) or the newer fixture (16442A/B). Either fixture works fine.
With the 16442A/B fixture, note that there are two SMU numbering schemes....3 SMUs with force
and sense, or six SMUs with force only. For this class example we will use the six (6) SMU scheme.
On older fixtures, this scheme is shown in light blue lettering. In newer fixtures, this scheme is
shown in white reverse background lettering.
This class exercise requires six jumper leads to connect the DUT. Connect the jumper leads between
the following terminals.
SMU1 : terminal 2
SMU2 : terminal 4
PGU1 : terminal 1
PGU2 : terminal 1
VSU1 : terminal 3
VSU2 : terminal 3
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