9300015500 Rev. C 7 of 14 Pre-installation Instructions
MS40+ Foreline Pumps
The 325-MS uses two MS40+ foreline pumps. See Table 8 for more information.
Table 8 MS40+ Foreline Pump Details
Item Information
Diameter of hole in bench, if needed 5.8 cm (2.3 in.)
Width 29.7 cm (11.75 in.)
Depth 41.8 cm (16.5 in.)
Height 22.8 cm (9 in.)
Vacuum hose length 1.8 m (6 ft)
Power cord length 2.5 m (8 ft)
Serial cable length 2.7 m (9 ft)
Dedicated circuits Varian recommends:
1 circuit for each pump which can provide 200-240V ac,
50-60 Hz, 10A
If required both pumps can use a single circuit which can
provide 200-240V ac, 50-60 Hz, 20A
Power cord plug CEE 7/7 or NEMA 6-15P
Exhaust System
Do not put the foreline pumps in an enclosed space. Foreline pumps exhaust most compounds
introduced into the MS and small amounts of oil vapor.
Provide an adequate fume exhaust system for the outlet of each foreline vacuum pump. Each
foreline pump must be vented at least 2 L/min. The API spray chamber must be vented at least
20 L/min to a separate vent line. Ensure that the exhaust system does not pull a vacuum on the
API chamber. Consult local regulations for the proper method of exhausting the fumes.
;
Check the checklist box: Exhaust system is suitable.
Temperature
The optimal operating temperature is between 16 and 30 °C (61-86 °F).
NOTE: As installation site temperature increases, system reliability decreases due to heat
generated by electronic components during operation. This heat must dissipate to the
surrounding air for reliable operation.
The airflow around the system must be adequate. The air-conditioning system must maintain a
constant temperature (within the operational limits) around the system. Do not place the system
near air ducts, windows, or heating and cooling systems. The average steady-state heat load
for the MS alone is 6,000 Btu, with a possible short-term heat dissipation of 15,000 Btu during
startup.
;
Check the checklist box: Temperature maintained between 16 and 30 °C
(61-86
°
F).
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