Agilent Technologies X3502-64170

Technical Information
Pump Used with Corrosive Gases
17
TwisTorr 74 FS User Manual / 87-901-053-01 333/342
Figure 49
Purge layout
1 Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve