Agilent Technologies X3502-64170

Technical Information
Technical Specification
17
TwisTorr 74 FS User Manual / 87-901-053-01 285/342
Technical Specification
Max gas throughput:
• water cooling (ambient temperature=35°C; water temperature= 25°C; backing
pump 5 m3/h)
• air cooling (ambient temperature=35°C; backing pump 5 m3/h)
Tab. 3
Technical Specification
Pumping speed
N
2
He
H
2
Ar
ISO 63 / CFF 4.5”
60 l/s
54 l/s
42 l/s
59 l/s
CFF 2.75”
50 l/s
40 l/s
31 l/s
51 l/s
KF 40
44 l/s
33 l/s
28 l/s
40 l/s
Max gas throughput at full
rotational speed (with
recommended forepump)
N
2
Ar
Air cooling
130 sccm
80 sccm
Water cooling
130 sccm
80 sccm
Compression ratio
N
2
He
H
2
Ar
1 × 10
9
2 × 10
5
1 × 10
4
> 1 × 10
9
Foreline Tolerance(
*
)
N
2
He
H
2
Ar
> 12 mbar
> 10 mbar
> 4 mbar
> 14 mbar
Base pressure with recommended
forepump
< 5 x 10
-10
mbar
(< 3.75 x 10
-10
Torr)
(According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the completion of
test dome bake-out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump)
(
*
) The Foreline Tolerance is the pressure at which the turbopump still produce a compression of
100