17 Technical Information
286/342 TwisTorr 74 FS User Manual / 87-901-053-01
Inlet flange CFF 4.5" O.D.
CFF 2.75” O.D.
ISO 63
KF 40
Foreline flange KF16 NW
Rotational speed 70000 rpm (1167 Hz driving frequency)
Start-up time < 2 minutes
Recommended forepump mechanical: Agilent DS 40M
mechanical: Agilent DS 102
dry pump: Agilent IDP-3
dry pump: Agilent IDP-7
Operating position Any
Operating ambient temperature +5 °C to +35 °C
Relative humidity of air 0 – 90 % (not condensing)
Bakeout temperature 80 °C at inlet flange (ISO63) and 120°C (CFF 4.5”) max
Lubricant Permanent lubrication
Cooling requirements Max forced cooling air temperature = 35°C
Max cooling water temperature = 25°C
Coolant water Minimum flow: 65 l/h (0.30 GPM)
Temperature: +15 °C to +25 °C
Pressure: 2 to 4 bar (30 to 60 psi)
Noise Pressure level (pump only) 40 ± 4 dB(A) at 1 meter
†
(Min = 32 dB(A), Max = 48 dB(A))
Pwr supply:
Input Voltage:
Input Frequency:
Max input pwr:
Stand-by pwr:
Max oper. power:
76 Vac, 3 Phase (provided by the controller)
1167 Hz max (provided by the controller)
130 VA
8 W
70 W (according to controller model) with water or air cooling
Installation category II
Pollution degree 2
Storage temperature -40° C to +70° C
Max operating altitude 3000 m
†
average value ± standard deviation.
To Next Page
Loading...
Need help?
General
