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Ametek SPECTRO ARCOS FHX22 - Page 49

Ametek SPECTRO ARCOS FHX22
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Maintenance
SPECTRO ARCOS FHX22
18.07.2019
49
For the installation of the Side-On Plasma Interfaces (SPI), see page 45.
Installation of the sample introduction SOP, see page 33.
Loading the method
After changing the plasma observation mode be sure to load the
corresponding method.
Changing from the radial (SOP) to the axial (EOP) plasma observation mode is
completed by applying the same steps in reverse order.

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