6-4
Chapter 6. TROUBLESHOOTING
Handling Precautions
•
Perform flow rate zero adjustment with the actual flow rate
stabilized to zero after completely replacing the inside of the
flow path with the gas to be controlled.
Note
•
Flow rate zero adjustment can be performed by external contact
input by selecting “flow rate zero adjustment” for
C-
10
to
C-
12
in the function setup. For details on how to set up functions,
Chapter 5. ADVANCED OPERATION.
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