Azbil MQV9020 - X84; Gas Type and Control Range; X84; China Rohs

7-9
Chapter 7. SPECIFICATIONS
 Gas type and control range
The controllable flow rate range may vary depending on the type of gas.
For details, see the tables below.
Model No.
Gas type
MQV9020 MQV9050 MQV9500
Control flow
rate range
mL/min
(standard)
Setup/display
resolution
mL/min
(standard)
Control flow
rate range
mL/min
(standard)
Setup/display
resolution
mL/min
(standard)
Control flow
rate range
L/min
(standard)
Setup/display
resolution
L/min
(standard)
Hydrogen 0.2 to 20.0 0.1 0.4 to 50.0 0.2 0.004 to 0.500 0.002
Helium 0.2 to 20.0 0.1 0.4 to 50.0 0.2 0.004 to 0.500 0.002
Model No.
Gas type
MQV0005 MQV0010 MQV0050
Control flow
rate range
L/min
(standard)
Setup/display
resolution
L/min
(standard)
Control flow
rate range
L/min
(standard)
Setup/display
resolution
L/min
(standard)
Control flow
rate range
L/min
(standard)
Setup/display
resolution
L/min
(standard)
Hydrogen 0.04 to 5.00 0.02 0.10 to 10.00 0.05 0.4 to 50.0 0.2
Helium 0.04 to 5.00 0.02 0.10 to 10.00 0.05 0.4 to 50.0 0.2
Model No.
Gas type
MQV0200
Control flow
rate range
L/min
(standard)
Setup/display
resolution
L/min
(standard)
Hydrogen 2 to 200 1
Helium 2 to 200 1
Note
•
The setup and display resolutions described above can be im-
proved by reducing the flow rate range using flow rate range
setup
C-24
or
C-25
.
A still higher resolution can be set using the analog setup (
C-03
=1). For more information, see section 5-4, "Flow Rate Range
Change Function and Settings and Display Resolutions After
Change of Range" (page 5-18).
 China RoHS