7-13
Chapter 7. SPECIFICATIONS
External dimensions
z Models with integrated display
MQV9020B/9050B/9500B/0005B/0010B/0050B/0200B
(For MQV9020B/9050B, only 1/4" Swagelok and 1/4" VCR connections apply)
Unit: mm
37
2-9/16-18UNF
44
2281
18.5
7.3
15.5 1847.8
(141.4)
Rc 1/4" tting (2)
Fitting made by Swagelok (2)
SS-400-1-6STSC11
Applicable pipe:
outside diameter 1/4",
material SUS316
23.523.5
(25.7) (25.7)
(137)
HEX21
HEX9/16
Rc 1/4" connection type
9/16-18UNF connection type
1/4" Swagelok connection type
30 ±0.5 30 ±0.5
11 ±0.515 ±0.5
M4 screw (2) depth 5 min.
130
90
102
(137.8)
(23.9) (23.9)
1/4" VCR
connection type
SS-4-VCR-1-00032SC11
Jack for
loader
OK
SP
PV
L
Digital
Mass Flow
Controller
L/
min
ALM EV1 EV2
RUN ENT
▲
▼
DISP
▲