10.6 Full Flow Check
1.Apply the gas at the appropriate inlet pressure.
2.Apply a Setpoint of 100%. This is accomplished by applying a 5.00 VDC setpoint (to pin A
r
elative to pin B or C on the cardedge connector.
3.Verify that the indicated flow output reads a steady 5 volts ±10 mV (pin 3 relative to pin B
(or C) on the cardedge connector. This is equivalent to a flow of 100% ±0.2%.
10.7 Flow Control Response Check
1.Close the valve by
(a) applying a 0% setpoint (where auto shut-off is enabled) or
(b) apply a Valve Off command (apply 0 volts to pin J of the cardedge connector).
2.Remove the Valve Off command.
- This accomplished by disconnecting pin J from pin 10.
3.Verify that the response time is correct.
- For “fast start” units refer to the response specifications for each model and range.
- For “slow star
t” (linear response) units the response time that is best for your application
was chosen at the time of your order
- 4-6 seconds, 6-10 seconds, 10-15 seconds, 20-30 seconds or 40-60 seconds
4.If the unit does not meet the response specifications contact Celerity for assistance.
10.8 Calibration Check
Calibration is checked by flowing gas through a calibration reference upstream from the
mass flow controller or meter.
- If the gas used for this calibration check is other than the specific surrogate gas or the
actual process gas (such as N2) MFC errors of up to ±10% can be expected. This is due
to the different characteristics among the different gases.
10
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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