2
2. STANDARD FEATURES
2.1 Attitude
- Each MFC is built for a specific attitude either HOS (Horizontal on Side) or HOV (Horizontal
or Vertical).
- For further details, refer to Section 7.3 “Mounting Attitude”.
2.2 Calibration Conditions
- MFCs ordered as “Atmosphere” are calibrated with the MFC’s outlet exhausting to
Atmosphere.
- MFCs ordered as “Vacuum” are calibrated with the MFC’s outlet exhausting to Vacuum.
2.3 Standard Temperature and Pressure
- 0°C and 760 mm Hg
2.4 Calibration Traceability
- National Institute of Standards and Technology (N.I.S.T.)
2.5 Manufacturing Environment
- Assembled, Calibrated, Tested and Packaged in Class 100 Cleanroom Environment
2.6 Purge Capability
- Full purge capability with 1 slm purge minimum (depends on gas density and pressure).
3. OPTIONAL FEATURES
Options are set at the factory, unless otherwise specified.
3.1 Auto Shut-off Option
- With the Auto Shut-off option a setpoint command of less than 2% (0.1 VDC) closes the
MFC control valve.
- Since an MFC valve is not a positive shutoff valve, a shutoff valve in series with the MFC
may be needed.
- Users of digital MFCs can disable or increase the Auto Shutoff option to any value up to a
maximum of 10% of the full scale operational range using the MultiFlo Virtual Interface.
(Refer to the MultiFlo Virtual Interface User’s Manual.)
3.2 Response Time Options
Fast: ≤1 Sec to a setpoint command of 20%-100% (per SEMI E17-91)
Soft Start: Ramping gradually (5 second linear ramp)
Soft start options: 4-6, 6-10, 10-15, 20-30, or 40-60 seconds.
- This option is configured in the factory for analog MFCs, and cannot be adjusted by the
user.
Users of digital MFCs can select the Response Time to be 0-20 seconds using the MultiFlo
Virtual Interface. (Refer to the Details section of the MultiFlo Virtual Interface User’s Manual.)
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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