12.7 Shipping Costs
Celerity pr
epays outgoing freight charges when any part of the service is performed under
warranty. All domestic shipments are sent via UPS ground transport. However, if the unit
has been r
eturned collect to Celerity, the costs are added to the repair invoice. Import/export
charges, foreign shipping charges, or special customer specified handling will be paid for by
the customer.
12.8 Returned Material Authorizations (RMA)
All product returns must accompany a RMA number for proper material handling within
Celerity. Contact customer service at (714) 921-2640, for a Returned Material Authorization
number.
12.9
Documentation
The documentation of the service and calibration should be maintained, based on the
location, in order to determine the contamination of each gas line. These procedures should
provide maximum cleanliness. This is required for many of the new, more critical
semiconductor processes.
13. MAINTENANCE
13.1 Emergency Service
In addition to a fast turnaround time for regular service and repairs, Celerity can, in most
cases, provide an advance replacement unit for EMERGENCY PRODUCTION DOWN
situations. In this way, your production can get back on-line while your original unit is
repaired.
13.2 Routine Maintenance
Any precision instrument such as a mass flow controller requires occasional servicing. It is
especially impor
tant to per
form this service if the flow controller has been operating for an
extended period of time or has been subjected to gases which leave excessive residue. If
non-reactive gases are used, the flow controller should be serviced annually. If reactive gases
are used, the flow controller should be serviced every six months.
Occasionally the Zero Offset should be checked. See the section, “Operation and
Per
for
mance Checks”, for adjustment instr
uctions.
13.3 Factory Calibration and Service
Celerity pr
ovides a 5 day turnaround time for factory calibration and repair, and an even
shorter turnaround time for a nominal additional cost.
13.4 Field Service
Celerity Mass Flow Contr
ollers ar
e field serviceable by the factory. They should be maintained,
cleaned, and repaired by an authorized Celerity/Unit repair center.
13
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com
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