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Delta DVP-SS2

Delta DVP-SS2
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3. Instruction Set
3-167
5. Adding mask and alignment mark function for CH0 and CH1
Available for the followings
Series
ES2/
EX2
ES2-C ES2-E
12SA2/
SX2
SS2 12SE 26SE 28SA2
Firmware
version
V3.28 V3.28 V1.00 V2.82 V3.28 V2.02 V2.0 V2.9
CH0 and CH1 relative parameters for Mask and Alignment Mark function:
Output
number
Marking
deceleration
flag
External
input
point
Ramp-up
time
Ramp-down
time
Starting/
Stopping
frequency
Number of
ramp-down
pulses
after
marking
Front
masking
Back
masking
CH0
(Y0/Y1)
M1156 X4 D1343 D1348 D1340
D1232/D12
33
D1026
D1027
D1100
D1101
CH1
(Y2/Y3)
M1158 X6 D1353 D1349 D1352
D1234/D12
35
D1135
D1136
D1102
D1103
Execution of the mask function (use Y0 as an example)
Pulse #
Frequency
D1026, D1027
Pulse number to end for masking in the front
D1100, D1101
Pulse number to start for
masking in the back
Waiting for external
interrupts X4
External interrupts X4
Invalid
External interrupts X4
Invalid
Target
frequency
start/end frequency
D1340

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