3. Instruction Set
5. Adding mask and alignment mark function for CH0 and CH1
Available for the followings
Series
ES2-C ES2-E
SS2 12SE 26SE 28SA2
V3.28 V3.28 V1.00 V2.82 V3.28 V2.02 V2.0 V2.9
CH0 and CH1 relative parameters for Mask and Alignment Mark function:
Output
number
Marking
flag
External
input
point
Ramp-up
time
Ramp-down
time
Starting/
Stopping
frequency
Number of
ramp-down
pulses
after
marking
Front
masking
Back
masking
CH0
(Y0/Y1)
M1156 X4 D1343 D1348 D1340
D1232/D12
33
D1026
D1027
D1100
D1101
CH1
(Y2/Y3)
M1158 X6 D1353 D1349 D1352
D1234/D12
35
D1135
D1136
D1102
D1103
Execution of the mask function (use Y0 as an example)
Pulse #
Frequency
D1026, D1027
Pulse number to end for masking in the front
D1100, D1101
Pulse number to start for
masking in the back
interrupts X4
Invalid
Invalid
Target
frequency
D1340