P.8
PM10U
EBARA
CORPORATION
3.5 Detailed Specifications
The following tables and figures should be consulted for pump specification,
dimension and performance details.
Table 3.1 Specification
Model Model ESA200W
Pumping Speed 20000 L/min
Ultimate Pressure 0.53 Pa
Gas Inlet NW80
Connection
Gas Outlet NW40
Approx. Power at Ultimate Pressure
(Motor Power)
3.2kW ; 50Hz / 3.4kW ; 60Hz
(3.7kW(2P) + 4.0kW)
Connection Coupler(Rc3/8)
Pressure
[Gauge Press.]
Supply: Max. 0.4MPa
Differential Press. : Min. 0.1MPa
Flow rate 3.5 - 8 L/min
Cooling
Water
Temperature 10 - 30 deg C
Connection 1/4” Tube Fitting(Same as Swagelok)
Pressure
[Gauge Press.]
Supply : 0.15 - 0.7MPa
[Setting : 0.09 - 0.12MPa]
N2
Gas
Approx. Flow rate
[N2-0 Mode]
17 - 20 Pa m
3
/s
[3.8 Pa m
3
/s]
Connection d 50 mm x L 50 mm
Pressure -196 Pa
Uti-li
ty
Duct
Venti-
Lation
*
Approx. Flow rate 0.5 m
3
/min
Brand BARRIERTA J100ES (NOK) Lubrication
Oil
Quantity 0.6 L
Approx. Weight 410 kg
Phase/Volt/Freq. 3 Phase , 200-220V at 50 / 60Hz
Power capacity 12.0 kVA (50 / 60Hz)
Japan Aviation Electronics Industry
Power
Supply
Connection
JL04HV-2E22-22PE-B
Control Signal D-sub 15 Pin + D-sub 25 Pin
Circuit Breaker 50A
Short Circuit Current Rating (SCCR) 2.5k A
Airborne noise test data [dB (A)] ** 64
[Note] * The ambient temperature of the pump installation place shall be 30
degrees of centigrade of lower.
** Test condition
(1) Pump is operating under ultimate pressure.
(2) Measured at 1m distance from cover and 1.6m height from floor.
To Next Page
Loading...
