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EBARA ESA200W - User Manual

EBARA ESA200W
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PM40U
EBARA
CORPORATION
ESA200_CSN_2_E_Rev. 0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA200W
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY COMPANY

Questions and Answers

  • Z
    zavalaandreaSep 23, 2025
    What does 'ALARM: EMERGENCY STOP' mean on my EBARA Water Pump?
    • M
      Mary MillerSep 23, 2025
      If your EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it means the pump was stopped by the emergency stop button. To resolve this, check that the pump can be operated and turn the button head to release the lock.
  • J
    Jesus RiosAug 25, 2025
    What to do if my EBARA ESA200W Water Pump shows 'ALARM: WATER FLOW LOW'?
    • H
      harold55Aug 25, 2025
      If you see 'ALARM: WATER FLOW LOW', it could be due to several reasons: * The coupler might be disconnected, so connect the coupler. * The pressure might not be sufficient, so apply sufficient pressure. * The root valve could be closed, so open the valve. * The water pipe could be clogged, so clean or replace the piping. * The tube fittings might be loosened, so re-tighten them. * The outlet and inlet pipes might be reversed, so connect the pipes correctly. Alternatively, the instrument might have failed, so replace the instrument.
  • W
    William BarnesAug 25, 2025
    What should I do if my EBARA ESA200W displays 'WARN: WATER FLOW LOW ##.#'?
    • B
      Benjamin RiceAug 26, 2025
      If your EBARA Water Pump displays 'WARN: WATER FLOW LOW ##.#', it could be due to several reasons: * A disconnected coupler, in which case you should connect the coupler. * Insufficient pressure, so apply sufficient pressure. * A closed root valve, so open the valve. * A clogged water pipe, so clean or replace the piping. * Loosened tube fittings, so re-tighten them. * Reversed outlet and inlet pipes, so connect the pipes correctly. Alternatively, the instrument might have failed, so replace the instrument.
  • C
    Christian StrongAug 26, 2025
    What to do if my EBARA ESA200W displays 'ALARM: CASING TEMP H.HIGH'?
    • J
      Jeremy SmithAug 27, 2025
      If your EBARA Water Pump displays 'ALARM: CASING TEMP H.HIGH', it could be due to several reasons: * Insufficient ventilation, so ventilate sufficiently. * Pump back pressure rises, so check the exhaust pipe and silencer. * Increase of the gas load, so reduce the inflow gas amount. * Reduced cooling water flow, so cool the pump thoroughly and reset it. * Accumulation of by-products, so replace or overhaul the pump.
  • J
    Jonathan NicholsAug 27, 2025
    What causes abnormal noise and excessive vibration in my EBARA Water Pump?
    • Y
      Yesenia CohenAug 27, 2025
      Abnormal noise and excessive vibration in your EBARA Water Pump can be caused by several factors: * If adjustment feet are not applied, use the adjustment feet. * If some object is making contact with the outer cover, remove the object. * If the fastening screws of the outer cover have worked themselves loose, tighten the fastening screws. In some cases, parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • A
    Amy RiddleSep 14, 2025
    What to do if my EBARA ESA200W displays 'ALARM: BP MOTOR TEMP H.HIGH ALARM: MP MOTOR TEMP H.HIGH'?
    • J
      Joyce RhodesSep 14, 2025
      If your EBARA Water Pump displays 'ALARM: BP MOTOR TEMP H.HIGH ALARM: MP MOTOR TEMP H.HIGH', it could be because the cooling water flow is reduced, so cool the pump thoroughly and reset it.
  • L
    Laura JonesSep 12, 2025
    Why does my EBARA ESA200W's BP not start?
    • D
      douglasjasonSep 12, 2025
      If your BP does not start, it could be because: * BP start signal is not entered in REMOTE mode, so enter the start signal. Alternatively, it could be due to instrument failure, so replace instruments.
  • J
    John ChanSep 13, 2025
    What does it mean if my EBARA ESA200W Water Pump displays 'WARN: PUMP N2 FLOW LOW'?
    • R
      robertquinnSep 13, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: * N2 port is not connected, so connect N2 pipe fitting. * Primary pressure is insufficient, so apply sufficient pressure. * Regulator setting value is LOW, so increase pressure setting. * N2 pipe is clogged, so replace N2 piping. * Leaks on N2 pipe, so check the fittings. Alternatively, the instrument might have failed, so replace the instrument.
  • K
    kenneth48Sep 4, 2025
    What does it mean if the power LED does not come on for my EBARA ESA200W Water Pump?
    • U
      urobertsonSep 5, 2025
      If the power LED does not come on, it could be due to: * No power supply to pump, so check the power supply. * The connector is not connected, so connect the power connector. * The CB is not ON, so place CB to ON.
  • S
    Sara CoffeySep 2, 2025
    What should I do if my EBARA ESA200W displays 'ALARM: BP MOTOR STEP OUT'?
    • K
      Kimberly FarrellSep 2, 2025
      If your EBARA Water Pump displays 'ALARM: BP MOTOR STEP OUT', it could be due to several reasons: * Pump back pressure rises, so check exhaust pipe. * Increase of the gas load, so reduce the inflow gas amount. * Rotor makes contact (Accumulation of by-products) (Substance plunge), so replace or overhaul pump. Alternatively, the instrument might have failed, so replace the instrument.

Summary

Environmental Basic Policies

Safety Information

Hazard Level Definitions

Defines DANGER, WARNING, and CAUTION symbols and their meanings.

Important Prior Warnings

Safety Interlocks

Standard Limited Warranty

EC Declaration of Conformity

Foreword

Introduction

Environmental Concerns

Guidelines for handling and maintaining the unit to minimize environmental impact.

Product Description

Pump Module and Utilities

Overview of pump module, N2 gas, cooling water, and exhaust systems.

Cooling Water and Exhaust

Control System

Warning and Alarm Signals

Explanation of the pump protection system's warning and alarm signals.

Operation Status Control

Pump Moving Procedures

Preparation and Moving Method

Steps for preparing and safely moving the pump unit.

Utility Disconnection

Electrical Power Lockout;Tagout

Procedure for safely shutting off and locking electrical power.

Cooling Water and Nitrogen Disconnection

Returning to Service

Detailed Specifications

Installation

Location and Fixation

Guidelines for selecting installation location and securing the pump.

Piping Connections

Vacuum and Exhaust Piping

Instructions for connecting vacuum and exhaust pipes to the pump.

Cooling Water Piping

N2 Gas Piping

Ventilation Duct

Electrical Wiring

Grounding and Power Supply

Procedures for electrical grounding and connecting the power supply.

Control Signal Wiring

Additional Emergency Off (EMO) Input

Power Supply for Accessories

LCD Controller

LCD Outline and Controls

Description of the LCD controller's physical layout and buttons.

LCD Indication Details

Setting Operational Modes

Operational Mode Setting Screen

Overview of the screen for setting operational modes.

Setting Pump Control and DIP Switch

Setting Running Modes and Speeds

Dip Switch Settings

DIP Switch Setting Display

LCD Controller Start;Stop Operation

Operation

Before Starting Procedures

Essential checks and actions before starting the pump.

Start;Stop Procedures

Local and Remote Start;Stop

Maintenance and Inspection

Internal Energies and Supplies

Information on power source, cooling water, and nitrogen gas.

Routine Inspection

Vacuum and Exhaust Piping Maintenance

Lubricant Oil Management

Spare Parts List

Wastes During Maintenance

Pump Overhaul Procedures

Disconnection and Transportation

Troubleshooting

Basic Trouble Diagnosis

Guidance for identifying and resolving basic operational issues.

Warning Troubleshooting

Alarm Troubleshooting

Option Troubleshooting

EBARA ESA200W Specifications

General IconGeneral
ModelESA200W
Power200W
Voltage220-240V
Cable Length10 m
Frequency50Hz
MaterialPlastic

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