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EBARA ESA200W - User Manual

EBARA ESA200W
92 pages
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PM40U
EBARA
CORPORATION
ESA200_CSN_2_E_Rev. 0
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL ESA200W
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference
To Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО in this INSTRUCTION MANUAL is our model code
ISSUED BY PRECISION MACHINERY COMPANY

Questions and Answers

Summary

Environmental Basic Policies

Safety Information

Hazard Level Definitions

Defines DANGER, WARNING, and CAUTION symbols and their meanings.

Important Prior Warnings

Safety Interlocks

Standard Limited Warranty

EC Declaration of Conformity

Foreword

Introduction

Environmental Concerns

Guidelines for handling and maintaining the unit to minimize environmental impact.

Product Description

Pump Module and Utilities

Overview of pump module, N2 gas, cooling water, and exhaust systems.

Cooling Water and Exhaust

Control System

Warning and Alarm Signals

Explanation of the pump protection system's warning and alarm signals.

Operation Status Control

Pump Moving Procedures

Preparation and Moving Method

Steps for preparing and safely moving the pump unit.

Utility Disconnection

Electrical Power Lockout;Tagout

Procedure for safely shutting off and locking electrical power.

Cooling Water and Nitrogen Disconnection

Returning to Service

Detailed Specifications

Installation

Location and Fixation

Guidelines for selecting installation location and securing the pump.

Piping Connections

Vacuum and Exhaust Piping

Instructions for connecting vacuum and exhaust pipes to the pump.

Cooling Water Piping

N2 Gas Piping

Ventilation Duct

Electrical Wiring

Grounding and Power Supply

Procedures for electrical grounding and connecting the power supply.

Control Signal Wiring

Additional Emergency Off (EMO) Input

Power Supply for Accessories

LCD Controller

LCD Outline and Controls

Description of the LCD controller's physical layout and buttons.

LCD Indication Details

Setting Operational Modes

Operational Mode Setting Screen

Overview of the screen for setting operational modes.

Setting Pump Control and DIP Switch

Setting Running Modes and Speeds

Dip Switch Settings

DIP Switch Setting Display

LCD Controller Start;Stop Operation

Operation

Before Starting Procedures

Essential checks and actions before starting the pump.

Start;Stop Procedures

Local and Remote Start;Stop

Maintenance and Inspection

Internal Energies and Supplies

Information on power source, cooling water, and nitrogen gas.

Routine Inspection

Vacuum and Exhaust Piping Maintenance

Lubricant Oil Management

Spare Parts List

Wastes During Maintenance

Pump Overhaul Procedures

Disconnection and Transportation

Troubleshooting

Basic Trouble Diagnosis

Guidance for identifying and resolving basic operational issues.

Warning Troubleshooting

Alarm Troubleshooting

Option Troubleshooting

EBARA ESA200W Specifications

General IconGeneral
ModelESA200W
Power200W
Voltage220-240V
Cable Length10 m
Frequency50Hz
MaterialPlastic

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