EBARA ESA200W - LCD Indication Details

P.30
PM10U
EBARA
CORPORATION
6.2 LCD Indication
The operating status of the pump is displayed on the LCD display of the
controller. For details of display, see Table 6.1.
Table 6.1 LCD controller indication
No ITEM INDICATION
BP: ##. # A
1
Current
MP : # # . # A
CONT ROL : L O C A L
2
Control mode
Pump running mode
MOD E : N OR M A L
PUMP RUNNI N G
3
Running history
(Indication of history)
HI STORY?
ALARM/ WARN I N G
4
Alarm history
(Indication of history)
HI STORY?
UNI T NO
5
Pump unit No.
&&&&&&&&
PUMP TYPE * * *
V 6
Pump type
Voltage
ESA&&&
OPE . T I ME
7
Total operation time
##### h
HT 1 : # # # 2 : # # #
8
Heater temperature (option)
°
C 3 : # # # 4 : # # #
BACK PRESS U R E
9
Back pressure (option)
##.# k P a
PUMP N2 FL O W
10
Pump N2 gas flow
##.# P a m
3
/ s
WA T E R F L O W
11
Cooling water flow
##.# L / m i n
PUMP CASI N G
12
Pump casing temperature
###
°
C
BP SPEED
13
Motor speed
#.#k m i n - 1
$$$$$: $$$$ $ $ $ %
14
WARNING/ALARM
$$$$$$$$$$ $ $ $ $