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EBARA EV-S100 - User Manual

EBARA EV-S100
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Safety Information

Hazard Level Definitions

Defines DANGER, WARNING, CAUTION, and NOTE terms used for hazard communication.

Important Prior Warnings

Pre-Operation Safety Warnings

Critical warnings and precautions to follow before installation and operation.

Safety Warning Labels

High Temperature and Voltage Warnings

Describes warnings for hot surfaces and hazardous electrical voltage.

Material and Weight Danger Warnings

Details warnings for hazardous materials and heavy object dangers.

Safety Interlocks

Interlock Functions and Monitoring

Explains safety interlock checks and functions for nitrogen flow and motor overload.

Shutting Off Residual Energy and Lockout;Tagout

Energy Shutoff Procedures

Advises on shutting off power, waiting for capacitors to discharge, and installing lockable shutoff devices.

Electrical Power Lockout;Tagout

Details steps for electrical lockout/tagout to ensure power is off before maintenance.

Cooling Water and Nitrogen Disconnection

Cooling Water Disconnection Steps

Details steps for closing water supply, disconnecting hoses, and draining.

Nitrogen (N2) Disconnection Steps

Steps for closing N2 supply, releasing pressure, and disconnecting lines.

Returning to Service Procedures

Installation and Pump Movement

Piping Connections

Electrical Wiring

General Electrical Wiring Precautions

Emphasizes turning off power, using qualified electricians, and avoiding power sharing.

Power Supply Wiring Connections

Power Supply Receptacle Specifications and Pin Assignments

Control Signal Wiring

CN-Z Control Connector Pin Assignments

CN-Y Control Connector Pin Assignments

Optional Emergency Stop (EMS) Switch Box

EMS Function Overview

Explains the function of the Emergency Stop button for immediate pump shutdown.

EMS System Flow Diagram

Shows the system flow for the Emergency Stop switch.

Emergency OFF (EMO) System Flow Example

Safety Interlock and Option Power Supply

Starting and Stopping the Pump with LCD Controller

LCD Controller Start;Stop Operation

Explains start/stop functionality with one or two LCD controllers connected.

Operation Procedures

Before Starting Checks

Details checks for cooling water supply, N2 gas supply, and regulator settings before operation.

Before Starting (Continued)

Before Starting (Final Checks)

Pump Start;Stop Procedures

Start;Stop Operation Notes

Local and Remote Start;Stop Operations

Communication Start;Stop and Power Failure Operation

Maintenance and Inspection: Internal Energies

Power Source Considerations

Advises turning off and lock-outing power supply before maintenance.

Cooling Water System for Maintenance

Details procedures for disconnecting cooling water connections for service.

Nitrogen Gas for Maintenance

Explains N2 gas usage for purging and pressure reduction during maintenance.

Routine Inspection Procedures

Routine Inspection and Warning Handling

Vacuum and Exhaust Piping Maintenance (Continued)

Lubricating Oil Supply and Checks

Lubricating Oil Level Gauge and Disposal

Disconnection and Transportation Procedures

Pump Transportation and Slinging Guidelines

Troubleshooting Guide

Troubleshooting: Basic Problems

Circuit Protector Activation and LCD Issues

Addresses issues like tripped circuit protectors, no LCD display, and connector problems.

MP and BP Start Failures

Troubleshoots why the Main Pump (MP) or Booster Pump (BP) might not start.

Noise, Vibration, and Vacuum Issues

Covers abnormal noise, excessive vibration, and vacuum pressure increases.

Memory Error Troubleshooting

Provides guidance for resolving "MEMORY ERROR" displayed on the LCD.

Troubleshooting: WARNING Messages

Water Flow and N2 Flow Warnings

Addresses warnings related to low water flow, low N2 flow, and possible causes.

Temperature and Communication Warnings

Covers warnings for high casing/motor temperatures and communication errors.

Box Temperature and N2 Valve Warnings

Addresses warnings for pump box temperature and N2 valve status.

Troubleshooting: ALARM Messages

Water Flow and Casing Temperature Alarms

Troubleshoots alarms for low water flow and high casing temperature.

Motor and Overload Alarms

Addresses alarms related to motor temperature, overload, and excessive current.

Step Out and Driver Alarms

Covers alarms for motor step out and driver protection issues.

Phase, Start, and General Alarms

Addresses alarms for phase errors, start failures, and existing warnings.

Troubleshooting: Option-Related Issues

Water Leakage and Back Pressure Alarms

Troubleshoots alarms for water leakage and high back pressure.

Emergency Stop Alarm

Explains how to handle the Emergency Stop alarm and release the button.

EBARA EV-S100 Specifications

General IconGeneral
BrandEBARA
ModelEV-S100
CategoryWater Pump
LanguageEnglish

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