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EBARA EV-S20P - User Manual

EBARA EV-S20P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Instruction Manual Overview

EBARA Multi-Stage Dry Vacuum Pump Models

Identifies the product as a multi-stage dry vacuum pump.

Safety Information

Important Prior Warnings

Lifting and Personnel Safety

Warning about lifting operations and qualified personnel.

Electrical Work and Safety Devices

Instructions on installing CB and interrupting CP before work.

Nitrogen Gas Usage

Use N2 gas for diluting flammable/toxic gases and purging piping.

Pump Overhaul and Usage Restrictions

Warning against using the pump for a different process without prior overhaul.

Important Prior Warnings (Continued)

Gas Leak Checks

Check for leaks after installing/maintaining piping to avoid hazardous discharge.

Withstand Voltage Test Prohibition

Warning against performing withstand voltage tests to avoid damage.

Unauthorized Pump Modifications

Warning against unauthorized modifications to pump parts or members.

Lifting Bracket Bolt Specifications

Specific instructions on using M6x12 and M6x16 bolts for lifting brackets.

Hot Surface Precautions

Caution about hot surfaces and contact with humans/flammable substances.

Operating Without Pump Cover

Safety caution against operating the pump without its cover.

Safety Interlock Checks

Periodically check safety interlocks to ensure correct operation.

Multi-Gas Injection Risks

Ebara does not assume risks from mixing gases; users must pay attention.

Safety Warning Labels

High Temperature Warning Label

Warning about hot surfaces that can cause burns.

Hazardous Materials Warning Label

Warning about hazardous materials that can cause fire, explosion, or poisoning.

Hazardous Voltage Warning Label

Warning about hazardous voltage that can cause shock, burn, or death.

Hazardous Weight Danger Label

Warning about heavy objects causing injury from falling or tipping.

Safety Interlocks

Periodic Interlock Function Checks

Reiteration to check safety interlocks every 6 months.

Standard Limited Warranty

Exclusions and Limitations

Lists conditions that void the warranty or are not covered.

Control System

Releasing Residual Energy

Electrical Power Lockout;Tagout

Procedures for safely shutting off electrical power for maintenance.

Model Specifications (EV-S20 Series)

Model Specifications (EV-S50 Series)

Model Specifications (EV-S100 Series)

Model Specifications (EV-S200 Series)

Installation Procedures

Pump Movement and Fixation

Instructions for moving and securing the pump.

Piping Connections

Vacuum and Exhaust Piping Guidelines

Instructions for connecting vacuum and exhaust pipes, including cautions.

Cooling Water Piping Guidelines

Instructions for connecting cooling water pipes and water quality specifications.

Nitrogen Gas Piping Guidelines

Instructions for connecting N2 gas tubing and fittings.

Electrical Wiring

Power Off and Lockout Procedures

Caution to turn off power and lockout before wiring.

Power Supply and Control Signal Connections (EV-S20;S50)

Diagrams showing power supply and control signal connector positions for EV-S20 and EV-S50.

Power Supply and Control Signal Connections (EV-S100;200)

Diagrams showing power supply and control signal connector positions for EV-S100/200.

Power Supply Receptacle Specifications and Pin Assignment

Tables and diagrams for power supply receptacle pin assignments and specifications.

Qualified Electrician Requirement

Emphasizes that electrical wiring must be done by qualified electricians.

Grounding Wire Connection

Warning to connect the grounding wire properly.

Control Signal Wiring

Emergency Stop Switch Box (Optional)

Function and System Flow of EMS Switch

Details the function and system flow of the optional EMS switch box.

LCD Controller Interface

Setting Operational Modes

Starting;Stopping Pump with LCD Controller

Pump Start;Stop Control Methods

How to start and stop the pump using one or two LCD controllers.

Operation

Before Starting Pump

Steps to take before starting the pump, including checking water and N2 supply.

START;STOP Operations

High Temperature Warnings During Operation;Stop

Warnings about high temperatures of pump and piping during/after operation.

LOCAL (Pump Side) Start;Stop

How to start and stop the pump using the controller's START/STOP buttons.

COMMUNICATION Start;Stop

How to start and stop the pump via communication interface.

REMOTE Start;Stop Procedures

How to start and stop the pump using external signals.

Maintenance and Inspection

Routine Inspection

Maintenance Procedures

Vacuum and Exhaust Piping Maintenance

Maintenance on vacuum and exhaust piping and safety precautions.

Gas Leak Checks Post-Maintenance

Importance of checking for gas leaks after maintenance.

Lubricating Oil Procedures

Disconnection and Transportation

Handling Toxic Gases and Safety

Precautions for handling toxic gases during disconnection.

Disassembly and Cleaning Precautions

Safety measures for disassembly and cleaning.

Troubleshooting Introduction

Pre-Maintenance Safety Warnings

Safety warnings to be observed before starting maintenance.

Troubleshooting (1) Basic Troubles

Basic Troubleshooting Steps

Table of basic troubleshooting steps for common abnormal symptoms.

Troubleshooting (2) WARNING Messages

Troubleshooting WARNINGs on LCD

Table of troubleshooting steps for WARNING messages displayed on the LCD.

Troubleshooting (3) ALARM Messages

Troubleshooting ALARMs on LCD

Table of troubleshooting steps for ALARM messages displayed on the LCD.

Troubleshooting (4) Optional Features

Troubleshooting Optional Features and Alarms

Table of troubleshooting steps for optional features and alarms.

EBARA EV-S20P Specifications

General IconGeneral
ModelEV-S20P
CategoryWater Pump
ManufacturerEBARA
Frequency50 Hz
Impeller MaterialStainless Steel
Outlet Diameter50 mm

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