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EBARA EV-S200P - User Manual

EBARA EV-S200P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • A
    Angela VegaSep 23, 2025
    What does 'WARN: PUMP BOX TEMP HIGH' mean on my EBARA Water Pump?
    • J
      Jacob AriasSep 23, 2025
      If your EBARA Water Pump displays 'WARN: PUMP BOX TEMP HIGH', the cooling water flow may be reduced, or the ambient temperature may be high. Increase cooling water flow or confirm the ambient temperature (less than 30?).
  • B
    brittneygarciaAug 25, 2025
    Why is the circuit protector activated on my EBARA EV-S200P Water Pump?
    • C
      Christopher RamirezAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.
  • T
    theresa79Aug 25, 2025
    What to do if EBARA Water Pump shows ALARM: WATER FLOW LOW?
    • J
      Julie ZimmermanAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • K
    Krystal GallegosAug 27, 2025
    Why is my EBARA EV-S200P making abnormal noises and vibrating excessively?
    • G
      greendavidAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • G
    Gary WilliamsSep 23, 2025
    What does 'WARN:PUMP N2 VALVE ERROR' mean on my EBARA EV-S200P Water Pump?
    • B
      Bradley CamposSep 23, 2025
      If your EBARA Water Pump displays 'WARN:PUMP N2 VALVE ERROR', the N2 valve may be open. Close N2 valve, which is located at the side of the pump.
  • R
    Ryan BaldwinSep 13, 2025
    What does 'ALARM : BACK PRESS.HIGH' mean on my EBARA Water Pump?
    • R
      Ronald McbrideSep 13, 2025
      If your EBARA Water Pump displays 'ALARM : BACK PRESS.HIGH', the exhaust valve may be closed, there may be accumulation of by-products in pipes, or there may be instruments failure. Check the exhaust pipe or replace the instruments.
  • S
    Sandra BarajasSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S200P?
    • N
      nelsonlukeSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • J
    jasmine83Sep 12, 2025
    What to do if my EBARA EV-S200P shows 'ALARM: WATER LEAKAGE'?
    • B
      bishopgregSep 12, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to loosened tube fittings or instrument failure. Re-tighten the tube fittings or replace the instrument.
  • Y
    ywatsonSep 4, 2025
    What to do if my EBARA EV-S200P MP does not start when entering external “MP start” signal input?
    • E
      Erin ArroyoSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • M
    Marissa SmithSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S200P Water Pump?
    • A
      Alan WilliamsSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.

Summary

Safety and Policy Information

Environmental Basic Policies

EBARA's commitment to environmental protection and management.

General Safety Guidelines

Essential safety information, hazard level definitions, and important warnings.

Safety Interlocks

Description of safety interlock mechanisms for pump protection.

Standard Limited Warranty

Terms, coverage, and exclusions of the EBARA limited warranty.

EC Declaration of Conformity

Manufacturer's declaration of compliance with relevant EU directives.

Product Overview and Specifications

Foreword and Introduction

Introduction to EBARA EV-S pumps and initial checks upon receipt.

Product Description

Details on pump module, N2 gas, cooling, exhaust, and control systems.

Detailed Specifications

Comprehensive technical specifications and model details for various EV-S series pumps.

Installation and Wiring

Pump Movement and Fixation

Guidelines for relocating and securely installing the pump.

Piping and Electrical Connections

Instructions for connecting vacuum, exhaust, water, N2, and electrical systems.

Control and Operation

LCD Controller Interface

Overview of the LCD controller, its buttons, and status indications.

Operational Modes and Settings

How to configure control modes, running modes, speeds, and dip switches.

Pump Operation Procedures

Steps for starting, stopping, and handling power failures.

Maintenance, Transportation, and Troubleshooting

Maintenance and Inspection

Procedures for routine checks, internal energy handling, and lubrication.

Disconnection and Transportation

Guidelines for safely disconnecting, purging, and transporting the pump.

SEMI S2 Standard Requirements

Necessary electrical parts and conditions for SEMI S2 compliance.

Troubleshooting Guide

Solutions for basic, warning, alarm, and option-related issues.

EBARA EV-S200P Specifications

General IconGeneral
ModelEV-S200P
CategoryWater Pump
TypeSubmersible
Power200W
Voltage220V
Frequency50Hz
Max Flow Rate200L/min
Max Head8m
Outlet Diameter1 inch
Cable Length10m
Pump TypeSubmersible

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