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EBARA EV-S200P - User Manual

EBARA EV-S200P
113 pages
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Safety and Policy Information

Environmental Basic Policies

EBARA's commitment to environmental protection and management.

General Safety Guidelines

Essential safety information, hazard level definitions, and important warnings.

Safety Interlocks

Description of safety interlock mechanisms for pump protection.

Standard Limited Warranty

Terms, coverage, and exclusions of the EBARA limited warranty.

EC Declaration of Conformity

Manufacturer's declaration of compliance with relevant EU directives.

Product Overview and Specifications

Foreword and Introduction

Introduction to EBARA EV-S pumps and initial checks upon receipt.

Product Description

Details on pump module, N2 gas, cooling, exhaust, and control systems.

Detailed Specifications

Comprehensive technical specifications and model details for various EV-S series pumps.

Installation and Wiring

Pump Movement and Fixation

Guidelines for relocating and securely installing the pump.

Piping and Electrical Connections

Instructions for connecting vacuum, exhaust, water, N2, and electrical systems.

Control and Operation

LCD Controller Interface

Overview of the LCD controller, its buttons, and status indications.

Operational Modes and Settings

How to configure control modes, running modes, speeds, and dip switches.

Pump Operation Procedures

Steps for starting, stopping, and handling power failures.

Maintenance, Transportation, and Troubleshooting

Maintenance and Inspection

Procedures for routine checks, internal energy handling, and lubrication.

Disconnection and Transportation

Guidelines for safely disconnecting, purging, and transporting the pump.

SEMI S2 Standard Requirements

Necessary electrical parts and conditions for SEMI S2 compliance.

Troubleshooting Guide

Solutions for basic, warning, alarm, and option-related issues.

EBARA EV-S200P Specifications

General IconGeneral
ModelEV-S200P
CategoryWater Pump
TypeSubmersible
Power200W
Voltage220V
Frequency50Hz
Max Flow Rate200L/min
Max Head8m
Outlet Diameter1 inch
Cable Length10m
Pump TypeSubmersible

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