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EBARA EV-S100N - User Manual

EBARA EV-S100N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • E
    ebartlettSep 23, 2025
    What does 'WARN: PUMP BOX TEMP HIGH' mean on my EBARA EV-S100N?
    • T
      twrightSep 23, 2025
      If your EBARA Water Pump displays 'WARN: PUMP BOX TEMP HIGH', the cooling water flow may be reduced, or the ambient temperature may be high. Increase cooling water flow or confirm the ambient temperature (less than 30?).
  • P
    pottermichaelAug 25, 2025
    Why is the circuit protector activated on my EBARA EV-S100N Water Pump?
    • J
      Julie GrahamAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.
  • M
    Michele FrazierAug 25, 2025
    What to do if EBARA EV-S100N Water Pump shows ALARM: WATER FLOW LOW?
    • S
      Scott DavisAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • E
    eboyleAug 27, 2025
    Why is my EBARA Water Pump making abnormal noises and vibrating excessively?
    • S
      Shannon BrownAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • K
    Keith BeasleySep 23, 2025
    What does 'WARN:PUMP N2 VALVE ERROR' mean on my EBARA EV-S100N?
    • S
      sheltonstephanieSep 23, 2025
      If your EBARA Water Pump displays 'WARN:PUMP N2 VALVE ERROR', the N2 valve may be open. Close N2 valve, which is located at the side of the pump.
  • J
    james59Sep 13, 2025
    What does 'ALARM : BACK PRESS.HIGH' mean on my EBARA EV-S100N Water Pump?
    • P
      Paul GilbertSep 13, 2025
      If your EBARA Water Pump displays 'ALARM : BACK PRESS.HIGH', the exhaust valve may be closed, there may be accumulation of by-products in pipes, or there may be instruments failure. Check the exhaust pipe or replace the instruments.
  • F
    Frederick WebbSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S100N Water Pump?
    • K
      Kevin HarmonSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • K
    kaitlyn87Sep 12, 2025
    What to do if my EBARA EV-S100N shows 'ALARM: WATER LEAKAGE'?
    • L
      Lisa JonesSep 12, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to loosened tube fittings or instrument failure. Re-tighten the tube fittings or replace the instrument.
  • D
    David CarpenterSep 4, 2025
    What to do if my EBARA EV-S100N MP does not start when entering external “MP start” signal input?
    • S
      Sarah ReedSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • M
    mario10Sep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S100N Water Pump?
    • B
      Bobby WilkinsSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.

Summary

Environmental Basic Policies

Corporate Environmental Commitment

Discusses the company's commitment to environmental protection and management.

Safety Information

Hazard Level Definitions

Explains DANGER, WARNING, CAUTION, and NOTE terms for hazard levels.

Important Prior Warnings

Critical Safety Precautions

Key warnings for lifting, electrical work, gas handling, and general safety.

Safety Interlocks

Interlock Functionality

Explains the role of safety interlocks in protecting the pump and system.

Standard Limited Warranty

Warranty Terms and Conditions

Details duration, coverage, exclusions, and limitations of the product warranty.

Product Description

N2 Gas System Functionality

Explains the use of nitrogen gas for purging, dilution, and shaft sealing.

Control System Overview

Covers the built-in unit, sensors, monitoring, and alarm levels.

Release and Shut Off Residual Energy

Electrical Lockout;Tagout Procedures

Procedures for safely shutting off electrical power using lockout/tagout.

Cooling Water Shutoff and Disconnection

Steps to shut off and disconnect the cooling water supply safely.

Nitrogen (N2) Disconnection

Steps to shut off and disconnect the nitrogen gas supply safely.

Detailed Specifications

Model Specifications (EV-S20 Series)

Provides detailed specifications for EV-S20, EV-S20P, EV-S20N models.

Model Specifications (EV-S50 Series)

Provides detailed specifications for EV-S50, EV-S50P, EV-S50N models.

Model Specifications (EV-S100 Series)

Provides detailed specifications for EV-S100, EV-S100P, EV-S100N models.

Model Specifications (EV-S200 Series)

Provides detailed specifications for EV-S200, EV-S200P, EV-S200N models.

Installation Guidelines

Pump Movement and Fixation

Instructions for moving and fixing the pump, including location and caster use.

Piping Connections

Electrical Wiring Procedures

General Wiring Precautions

General warnings and precautions for electrical wiring work.

Power Supply and Control Wiring

Shows connector positions for power supply and control signals for different models.

Control Signal Connector Details

Details on control connector specifications and pin assignments.

Optional Emergency Stop Switch

Explains the function and system flow of the optional Emergency Stop Switch Box.

LCD Controller Interface

Setting Operational Modes via LCD

Instructions for setting various operational modes via the LCD controller.

Pump Start;Stop Control

Operation Procedures

Pre-Start Checks and N2 Gas

Pre-operation checks for cooling water and N2 gas supply.

Start;Stop Operations

Maintenance and Inspection

Internal Energy Considerations

Information on internal energies (power source, cooling water, N2 gas) before maintenance.

Lubricating Oil Supply

Steps for supplying lubricating oil if the level is low.

Disconnection and Transportation

Safety Procedures for Disconnection

Safety precautions and procedures for disconnecting the pump.

SEMI S2 Standard Requirements

Troubleshooting Guide

General Troubleshooting Warnings

General warnings before starting troubleshooting or maintenance.

Basic Troubleshooting Steps

Table of common abnormal symptoms and their corrective actions.

Troubleshooting WARNINGs

Table of WARNING symptoms and their corrective actions.

Troubleshooting ALARMs

Table of ALARM symptoms and their corrective actions.

Troubleshooting Optional Features

Table of optional troubleshooting symptoms and their corrective actions.

EBARA EV-S100N Specifications

General IconGeneral
ModelEV-S100N
CategoryWater Pump
TypeCentrifugal Pump
Maximum Flow Rate100 L/min
Maximum Head55 m
MaterialStainless Steel
Maximum Operating Pressure10 bar
Motor ProtectionIP55
Insulation ClassF
Material (Pump Body)Stainless Steel
Material (Impeller)Stainless Steel
Material (Shaft)Stainless Steel
Pumped LiquidClean Water
Outlet Connection1 1/4 inch
StagesSingle Stage

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