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EBARA EV-S100N - User Manual

EBARA EV-S100N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Environmental Basic Policies

Corporate Environmental Commitment

Discusses the company's commitment to environmental protection and management.

Safety Information

Hazard Level Definitions

Explains DANGER, WARNING, CAUTION, and NOTE terms for hazard levels.

Important Prior Warnings

Critical Safety Precautions

Key warnings for lifting, electrical work, gas handling, and general safety.

Safety Interlocks

Interlock Functionality

Explains the role of safety interlocks in protecting the pump and system.

Standard Limited Warranty

Warranty Terms and Conditions

Details duration, coverage, exclusions, and limitations of the product warranty.

Product Description

N2 Gas System Functionality

Explains the use of nitrogen gas for purging, dilution, and shaft sealing.

Control System Overview

Covers the built-in unit, sensors, monitoring, and alarm levels.

Release and Shut Off Residual Energy

Electrical Lockout;Tagout Procedures

Procedures for safely shutting off electrical power using lockout/tagout.

Cooling Water Shutoff and Disconnection

Steps to shut off and disconnect the cooling water supply safely.

Nitrogen (N2) Disconnection

Steps to shut off and disconnect the nitrogen gas supply safely.

Detailed Specifications

Model Specifications (EV-S20 Series)

Provides detailed specifications for EV-S20, EV-S20P, EV-S20N models.

Model Specifications (EV-S50 Series)

Provides detailed specifications for EV-S50, EV-S50P, EV-S50N models.

Model Specifications (EV-S100 Series)

Provides detailed specifications for EV-S100, EV-S100P, EV-S100N models.

Model Specifications (EV-S200 Series)

Provides detailed specifications for EV-S200, EV-S200P, EV-S200N models.

Installation Guidelines

Pump Movement and Fixation

Instructions for moving and fixing the pump, including location and caster use.

Piping Connections

Electrical Wiring Procedures

General Wiring Precautions

General warnings and precautions for electrical wiring work.

Power Supply and Control Wiring

Shows connector positions for power supply and control signals for different models.

Control Signal Connector Details

Details on control connector specifications and pin assignments.

Optional Emergency Stop Switch

Explains the function and system flow of the optional Emergency Stop Switch Box.

LCD Controller Interface

Setting Operational Modes via LCD

Instructions for setting various operational modes via the LCD controller.

Pump Start;Stop Control

Operation Procedures

Pre-Start Checks and N2 Gas

Pre-operation checks for cooling water and N2 gas supply.

Start;Stop Operations

Maintenance and Inspection

Internal Energy Considerations

Information on internal energies (power source, cooling water, N2 gas) before maintenance.

Lubricating Oil Supply

Steps for supplying lubricating oil if the level is low.

Disconnection and Transportation

Safety Procedures for Disconnection

Safety precautions and procedures for disconnecting the pump.

SEMI S2 Standard Requirements

Troubleshooting Guide

General Troubleshooting Warnings

General warnings before starting troubleshooting or maintenance.

Basic Troubleshooting Steps

Table of common abnormal symptoms and their corrective actions.

Troubleshooting WARNINGs

Table of WARNING symptoms and their corrective actions.

Troubleshooting ALARMs

Table of ALARM symptoms and their corrective actions.

Troubleshooting Optional Features

Table of optional troubleshooting symptoms and their corrective actions.

EBARA EV-S100N Specifications

General IconGeneral
ModelEV-S100N
CategoryWater Pump
TypeCentrifugal Pump
Maximum Flow Rate100 L/min
Maximum Head55 m
MaterialStainless Steel
Maximum Operating Pressure10 bar
Motor ProtectionIP55
Insulation ClassF
Material (Pump Body)Stainless Steel
Material (Impeller)Stainless Steel
Material (Shaft)Stainless Steel
Pumped LiquidClean Water
Outlet Connection1 1/4 inch
StagesSingle Stage

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