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EBARA EV-S50 - User Manual

EBARA EV-S50
113 pages
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

3. Product Description

3.4 Release and Shut Off Residual Internal Energy

Safety procedures for shutting off power and residual energy before maintenance.

4. Installation

4.2 Piping

Cautions and procedures for connecting vacuum, exhaust, water, and gas pipes.

4.3 Electrical Wiring

Procedures for connecting power supply and control signals to the pump.

5. LCD Controller

5.5 Starting;Stopping the Pump with the LCD Controller

Procedures for starting and stopping the pump using one or two LCD controllers.

6. Operation

6.1 Before Starting

Pre-operation checks for cooling water and N2 gas supply.

6.2 START;STOP

Procedures for starting and stopping the pump via local, remote, or communication interfaces.

7. Maintenance and Inspection

7.1 Internal Energies

Information on internal energies (power, water, gas) before starting maintenance.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Troubleshooting (1) Basic Trouble

Table of common abnormal symptoms and their corrective actions.

10.2 Troubleshooting (2) WARNING

Troubleshooting guide for WARNING displays and associated symptoms.

10.3 Troubleshooting (3) ALARM

Troubleshooting guide for ALARM displays and associated symptoms.

EBARA EV-S50 Specifications

General IconGeneral
BrandEBARA
ModelEV-S50
CategoryWater Pump
LanguageEnglish

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