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EBARA EV-S50 - User Manual

EBARA EV-S50
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • D
    Danielle RodriguezSep 23, 2025
    What does 'WARN: PUMP BOX TEMP HIGH' mean on my EBARA EV-S50 Water Pump?
    • K
      Kelli HamiltonSep 23, 2025
      If your EBARA Water Pump displays 'WARN: PUMP BOX TEMP HIGH', the cooling water flow may be reduced, or the ambient temperature may be high. Increase cooling water flow or confirm the ambient temperature (less than 30?).
  • C
    Cassandra BlairAug 25, 2025
    Why is the circuit protector activated on my EBARA Water Pump?
    • H
      Holly KennedyAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.
  • K
    Kathleen BurgessAug 25, 2025
    What to do if EBARA EV-S50 Water Pump shows ALARM: WATER FLOW LOW?
    • S
      Samuel MooreAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • A
    andrea60Aug 26, 2025
    Why is my EBARA EV-S50 making abnormal noises and vibrating excessively?
    • T
      thomasgriffinAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • G
    Gary GatesSep 23, 2025
    What does 'WARN:PUMP N2 VALVE ERROR' mean on my EBARA EV-S50 Water Pump?
    • B
      Bradley SalasSep 23, 2025
      If your EBARA Water Pump displays 'WARN:PUMP N2 VALVE ERROR', the N2 valve may be open. Close N2 valve, which is located at the side of the pump.
  • K
    Kelli MacdonaldSep 13, 2025
    What does 'ALARM : BACK PRESS.HIGH' mean on my EBARA EV-S50?
    • S
      Shane HuffmanSep 13, 2025
      If your EBARA Water Pump displays 'ALARM : BACK PRESS.HIGH', the exhaust valve may be closed, there may be accumulation of by-products in pipes, or there may be instruments failure. Check the exhaust pipe or replace the instruments.
  • G
    Gregory KnappSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S50?
    • O
      oariasSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • N
    Nicholas ReyesSep 12, 2025
    What to do if my EBARA EV-S50 shows 'ALARM: WATER LEAKAGE'?
    • S
      Susan ThompsonSep 12, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to loosened tube fittings or instrument failure. Re-tighten the tube fittings or replace the instrument.
  • C
    Carly RichmondSep 4, 2025
    What to do if my EBARA EV-S50 MP does not start when entering external “MP start” signal input?
    • B
      Brian PalmerSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • K
    Kimberly SchmittSep 1, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S50 Water Pump?
    • S
      Stephanie IrwinSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

3. Product Description

3.4 Release and Shut Off Residual Internal Energy

Safety procedures for shutting off power and residual energy before maintenance.

4. Installation

4.2 Piping

Cautions and procedures for connecting vacuum, exhaust, water, and gas pipes.

4.3 Electrical Wiring

Procedures for connecting power supply and control signals to the pump.

5. LCD Controller

5.5 Starting;Stopping the Pump with the LCD Controller

Procedures for starting and stopping the pump using one or two LCD controllers.

6. Operation

6.1 Before Starting

Pre-operation checks for cooling water and N2 gas supply.

6.2 START;STOP

Procedures for starting and stopping the pump via local, remote, or communication interfaces.

7. Maintenance and Inspection

7.1 Internal Energies

Information on internal energies (power, water, gas) before starting maintenance.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Troubleshooting (1) Basic Trouble

Table of common abnormal symptoms and their corrective actions.

10.2 Troubleshooting (2) WARNING

Troubleshooting guide for WARNING displays and associated symptoms.

10.3 Troubleshooting (3) ALARM

Troubleshooting guide for ALARM displays and associated symptoms.

EBARA EV-S50 Specifications

General IconGeneral
BrandEBARA
ModelEV-S50
CategoryWater Pump
LanguageEnglish

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