P.7
3.4 Release and shut off residual internal energy
WARNING To avoid dangers potentially encountered during maintenance,
transportation or storage, follow instructions below to shut off
power.
WARNING Capacitors within the control panel retain residual energy after
interruption of power supply. Wait five (5) minutes after shutting
off breaker before opening the control panel. Carefully check that
bleed circuits have discharged the residual energy before servicing
the control panel.
WARNING To comply with SEMI S2, install lockable shutoff devices on electrical,
nitrogen and cooling water supplies. These devices should be
adjacent to and within sight of the pump.
3.4.1 Electrical Power - Lockout and Tagout
Lock the branch circuit in the OFF position and tag it out to perform maintenance or
troubleshooting.
The Lockout/Tagout procedures must comply with OSHA 29 CFR 1910.147 and
1910.331-335
1. Turn off the pump circuit protector.
2. Turn the branch circuit disconnect off.
Check with a voltmeter that the power is shut off the pump.
3. Insert padlock through holes provided on locking device. Close padlock and
attach tag. Keep the key with you while working.
4. Check that the LCD display is off.
PM10U
EBARA
CORPORATION
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