（iii）
Important Prior Warnings
DANGER Keep out from under the pump when lifted.
Only qualified personnel shall unload and lift the pump.
WARNING Be careful not to overturn the pump when pushing and pulling it
sideways, because the width of the pump is small to its height.
WARNING All electrical works must be performed by only a qualified electrician.
All national and local electrical regulations must be observed.
WARNING Circuit Breaker (CB) is not installed in the pump unit.
Please install Circuit Breaker (CB) based on the law and the standard
in the installation region.
WARNING Interrupt Circuit Protector (CP) before starting on wiring
and maintenance work.
Do not switch on the power supply to the pump until work is completed.
WARNING Supply N
2
gas to the exhaust piping when necessary to dilute
the inflammable or toxic gas up to a safe concentration.
WARNING Purge with sufficient N
2
gas before removing and washing the
vacuum and exhaust piping.
Do not let inflammable, toxic or dangerous materials
disperse and guard against contact with the human body.
Always work in a location with an escape route in an emergency.
WARNING Do not use the pump for another process without a previous
overhaul. Gases or reaction products remaining in the pump will
react and lead to accidents with the formation of large amounts of
products.
PM10U
EBARA
CORPORATION
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