PM10U
EBARA
CORPORATION
Model EV-PA in this document is model code of Ebara.
Date Contents
2019/04/04 Initial Release
2019/04/19 Drawing update
2019/05/21 Front page module name
ISSUED BY PRECISION MACHINERY COMPANY
INSTRUCTION MANUAL
DRY VACUUM PUMP
MODEL EV-PA 250
MODEL EV-PA 500
Doc.No.7312-Z94024 Rev.2
CAUTION
Read and understand this INSTRUCTION MANUAL thoroughly before using
this equipment.
Keep this INSTRUCTION MANUAL on hand for future reference.
!
To Facility and Tool Manufactures:
Distribute this Instruction Manual to all end-user personnel actually operating
this equipment.
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