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EBARA EV-S200N - User Manual

EBARA EV-S200N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

Standard Limited Warranty

Product Description

Shutting Off Residual Energy

Instructions to safely shut off power and discharge residual energy before maintenance.

Electrical Power Lockout;Tagout

Procedures for locking out electrical power supply to ensure safety during maintenance.

Cooling Water Disconnection

Steps to disconnect and drain cooling water supply for maintenance.

Nitrogen Gas Disconnection

Procedure to safely shut off and disconnect the nitrogen gas supply.

Installation

Movement and Fixation

Guidance on moving the pump and securing it in place.

Piping Connections

Instructions for connecting vacuum and exhaust piping to the pump.

Electrical Wiring

Instructions and warnings for performing electrical wiring connections safely.

Power Supply Wiring

Details on power supply connector and control signal connector positions.

Emergency Stop Switch Box

Details and functions of the optional Emergency Stop Switch Box.

LCD Controller

Setting Operational Modes

How to set operational modes like control, running, and speed via the LCD controller.

Setting Pump Operation Control Mode

Procedure to select control modes: Local, Remote, or COM.

Setting the DIP Switch

Guide to setting DIP switches for various operating modes and functions.

Operation

Before Starting Pump Operation

Essential checks and procedures to perform before starting the pump.

Pump Start and Stop

Methods for starting and stopping the pump using DIP switches and controllers.

Local Start;Stop Control

How to start and stop the pump using the controller's START/STOP buttons.

Remote Start;Stop Control

Starting and stopping the pump using external signals via the control connector.

Communication Start;Stop Control

Starting and stopping the pump via communication interface.

Maintenance and Inspection

Disconnection and Transportation

SEMI S2 Standard Compliance

Troubleshooting

Basic Troubleshooting Guide

Table of basic troubleshooting steps for common abnormal symptoms and their solutions.

Troubleshooting WARNING Messages

Troubleshooting guide for WARNING messages displayed by the pump.

Troubleshooting ALARM Messages

Troubleshooting guide for ALARM messages indicating critical pump issues.

Troubleshooting Optional Features

Troubleshooting guide for issues related to optional pump features.

EBARA EV-S200N Specifications

General IconGeneral
ModelEV-S200N
CategoryWater Pump
Power SupplyElectric
Frequency50Hz
Motor Power0.75 kW
Weight15 kg
Outlet Connection1 inch
MaterialStainless Steel
ApplicationWater supply

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