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EBARA EV-S200N - User Manual

EBARA EV-S200N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
「
Model ООО
」
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • D
    Dustin SullivanAug 30, 2025
    What does 'WARN: CASING TEMP HIGH' mean on my EBARA Water Pump?
    • S
      Shannon RangelAug 31, 2025
      If your EBARA Water Pump displays 'WARN: CASING TEMP HIGH', it could be due to a rise in pump back pressure, an increase in the gas load, accumulation of by-product, or reduced cooling water flow. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or increase cooling water flow.
  • R
    rwilliamsAug 29, 2025
    Why does nothing appear on the LCD of my EBARA EV-S200N Water Pump?
    • D
      darius71Aug 29, 2025
      If the LCD on your EBARA Water Pump shows nothing, it could be due to several reasons. First, check the power supply to ensure the pump is receiving power. Next, verify that the connector is properly connected. Also, make sure the CP is turned ON. Check the LCD’s connector to ensure that it is connected. If none of these steps resolve the issue, the instrument may have failed and need replacement.
  • C
    Cassandra RiveraAug 28, 2025
    What causes 'ALARM: CASING TEMP H.HIGH' on my EBARA Water Pump?
    • T
      Troy ClarkAug 28, 2025
      If your EBARA Water Pump displays 'ALARM: CASING TEMP H.HIGH', the pump back pressure may be rising, there may be an increase in the gas load, cooling water flow may be reduced, or there may be an accumulation of by-products. Check the exhaust pipe, reduce the inflow gas amount, cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • E
    Eric ValenzuelaAug 27, 2025
    What does 'WARN: WATER FLOW LOW' mean on my EBARA EV-S200N and how do I fix it?
    • A
      Andrew EsparzaAug 27, 2025
      If the EBARA Water Pump displays 'WARN: WATER FLOW LOW', it could be due to several reasons: * Coupler is disconnected, so connect it. * Pressure is insufficient, so apply sufficient pressure. * Root valve is closed, so open the valve. * Water pipe is clogged, so clean or replace the piping. * Tube fittings are loosened, so re-tighten them. * Instrument failure, so replace the instrument. * Outlet & inlet pipes are reversed, so connect the pipes correctly.
  • B
    Benjamin MurphyAug 27, 2025
    Why is my EBARA EV-S200N making abnormal noises and vibrating excessively?
    • R
      Roy NortonAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • C
    Cindy WallaceAug 25, 2025
    What to do if EBARA Water Pump shows ALARM: WATER FLOW LOW?
    • C
      Charlene WalkerAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • K
    Kathryn Walters DDSAug 25, 2025
    Why is the circuit protector activated on my EBARA Water Pump?
    • B
      Bradley DyerAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

Standard Limited Warranty

Product Description

Shutting Off Residual Energy

Instructions to safely shut off power and discharge residual energy before maintenance.

Electrical Power Lockout;Tagout

Procedures for locking out electrical power supply to ensure safety during maintenance.

Cooling Water Disconnection

Steps to disconnect and drain cooling water supply for maintenance.

Nitrogen Gas Disconnection

Procedure to safely shut off and disconnect the nitrogen gas supply.

Installation

Movement and Fixation

Guidance on moving the pump and securing it in place.

Piping Connections

Instructions for connecting vacuum and exhaust piping to the pump.

Electrical Wiring

Instructions and warnings for performing electrical wiring connections safely.

Power Supply Wiring

Details on power supply connector and control signal connector positions.

Emergency Stop Switch Box

Details and functions of the optional Emergency Stop Switch Box.

LCD Controller

Setting Operational Modes

How to set operational modes like control, running, and speed via the LCD controller.

Setting Pump Operation Control Mode

Procedure to select control modes: Local, Remote, or COM.

Setting the DIP Switch

Guide to setting DIP switches for various operating modes and functions.

Operation

Before Starting Pump Operation

Essential checks and procedures to perform before starting the pump.

Pump Start and Stop

Methods for starting and stopping the pump using DIP switches and controllers.

Local Start;Stop Control

How to start and stop the pump using the controller's START/STOP buttons.

Remote Start;Stop Control

Starting and stopping the pump using external signals via the control connector.

Communication Start;Stop Control

Starting and stopping the pump via communication interface.

Maintenance and Inspection

Disconnection and Transportation

SEMI S2 Standard Compliance

Troubleshooting

Basic Troubleshooting Guide

Table of basic troubleshooting steps for common abnormal symptoms and their solutions.

Troubleshooting WARNING Messages

Troubleshooting guide for WARNING messages displayed by the pump.

Troubleshooting ALARM Messages

Troubleshooting guide for ALARM messages indicating critical pump issues.

Troubleshooting Optional Features

Troubleshooting guide for issues related to optional pump features.

EBARA EV-S200N Specifications

General IconGeneral
ModelEV-S200N
CategoryWater Pump
Power SupplyElectric
Frequency50Hz
Motor Power0.75 kW
Weight15 kg
Outlet Connection1 inch
MaterialStainless Steel
ApplicationWater supply

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