EasyManua.ls Logo

EBARA EV-S200N - User Manual

EBARA EV-S200N
113 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Loading...
Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • A
    adamsaprilSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA Water Pump?
    • S
      Scott RiveraSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • J
    Jamie WilsonSep 9, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA EV-S200N?
    • T
      Thomas VillanuevaSep 10, 2025
      If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
  • S
    stevenshenrySep 8, 2025
    What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA EV-S200N Water Pump?
    • W
      walkerfrankSep 8, 2025
      If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
  • M
    Michael ThorntonSep 7, 2025
    What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA Water Pump?
    • D
      drew55Sep 7, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • K
    kmillsAug 23, 2025
    What to do if my EBARA Water Pump shows 'ALARM: EMERGENCY STOP'?
    • C
      Christopher WalshAug 23, 2025
      If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
  • T
    Tammy MunozSep 5, 2025
    What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA Water Pump?
    • F
      fernandezmanuelSep 5, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • M
    Mark SpencerSep 4, 2025
    What to do if my EBARA Water Pump MP does not start when entering external “MP start” signal input?
    • W
      William SmithSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • C
    Chris FordSep 3, 2025
    What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA EV-S200N Water Pump?
    • B
      Barbara MartinSep 3, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
  • S
    Stephanie Woods DDSSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S200N?
    • L
      Lindsey StokesSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • W
    williamspatriciaAug 31, 2025
    What to do if my EBARA EV-S200N Water Pump MP does not start when applying START button?
    • R
      Ronald JohnsonAug 31, 2025
      If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

Standard Limited Warranty

Product Description

Shutting Off Residual Energy

Instructions to safely shut off power and discharge residual energy before maintenance.

Electrical Power Lockout;Tagout

Procedures for locking out electrical power supply to ensure safety during maintenance.

Cooling Water Disconnection

Steps to disconnect and drain cooling water supply for maintenance.

Nitrogen Gas Disconnection

Procedure to safely shut off and disconnect the nitrogen gas supply.

Installation

Movement and Fixation

Guidance on moving the pump and securing it in place.

Piping Connections

Instructions for connecting vacuum and exhaust piping to the pump.

Electrical Wiring

Instructions and warnings for performing electrical wiring connections safely.

Power Supply Wiring

Details on power supply connector and control signal connector positions.

Emergency Stop Switch Box

Details and functions of the optional Emergency Stop Switch Box.

LCD Controller

Setting Operational Modes

How to set operational modes like control, running, and speed via the LCD controller.

Setting Pump Operation Control Mode

Procedure to select control modes: Local, Remote, or COM.

Setting the DIP Switch

Guide to setting DIP switches for various operating modes and functions.

Operation

Before Starting Pump Operation

Essential checks and procedures to perform before starting the pump.

Pump Start and Stop

Methods for starting and stopping the pump using DIP switches and controllers.

Local Start;Stop Control

How to start and stop the pump using the controller's START/STOP buttons.

Remote Start;Stop Control

Starting and stopping the pump using external signals via the control connector.

Communication Start;Stop Control

Starting and stopping the pump via communication interface.

Maintenance and Inspection

Disconnection and Transportation

SEMI S2 Standard Compliance

Troubleshooting

Basic Troubleshooting Guide

Table of basic troubleshooting steps for common abnormal symptoms and their solutions.

Troubleshooting WARNING Messages

Troubleshooting guide for WARNING messages displayed by the pump.

Troubleshooting ALARM Messages

Troubleshooting guide for ALARM messages indicating critical pump issues.

Troubleshooting Optional Features

Troubleshooting guide for issues related to optional pump features.

EBARA EV-S200N Specifications

General IconGeneral
ModelEV-S200N
CategoryWater Pump
Power SupplyElectric
Frequency50Hz
Motor Power0.75 kW
Weight15 kg
Outlet Connection1 inch
MaterialStainless Steel
ApplicationWater supply

Related product manuals