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EBARA EV-S50P - User Manual

EBARA EV-S50P
113 pages
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Instruction Manual Overview

General Safety Precautions

Initial cautions for reading and understanding the manual before equipment use.

Safety Information

Hazard Level Designations

Defines terms like DANGER, WARNING, and CAUTION used in the manual.

Important Prior Warnings

Lifting and Electrical Safety

Warnings regarding pump lifting, qualified electricians, and circuit breakers.

Gas Handling and Purging

Safety instructions for handling N2 gas and purging piping.

Safety Warning Labels

Standard Limited Warranty

Product Description

Release and Shut Off Residual Internal Energy

Electrical Power Lockout;Tagout

Procedures for safely disconnecting electrical power for maintenance.

Cooling Water and Nitrogen Shutoff

Steps to shut off and disconnect cooling water and N2 gas supplies.

Installation Guidelines

Piping Connections

Electrical Wiring

Power Supply Wiring

Information on power supply connectors and wiring for different models.

Control Signal Wiring

Details on connecting control signals for remote operation and monitoring.

LCD Controller Operation

Operational Mode Settings

Procedures for setting control, running, and speed modes via LCD.

DIP Switch Settings

Configuration of pump modes and functions using DIP switches.

Pump Operation

Before Starting Procedures

Essential checks and preparations before operating the pump.

Start;Stop Operations

Methods for starting and stopping the pump, including safety notes.

Maintenance and Inspection

Disconnection and Transportation

Toxic Gas Handling and Precautions

Safety measures when handling toxic gases during disconnection.

Slinging and Securing the Pump

Guidance on safe lifting and securing methods for transportation.

SEMI S2 Standard Requirements

Troubleshooting Guide

Basic Troubleshooting

Common issues like circuit protector activation and LCD errors.

Warning Troubleshooting

Solutions for WARNING displays related to water flow, temperature, and communication.

Alarm Troubleshooting

Solutions for ALARM displays like water flow, temperature, motor overload, and phase errors.

EBARA EV-S50P Specifications

General IconGeneral
BrandEBARA
ModelEV-S50P
CategoryWater Pump
LanguageEnglish

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