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EBARA EV-S50P - User Manual

EBARA EV-S50P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • C
    Christina FuentesSep 23, 2025
    What does 'WARN: PUMP BOX TEMP HIGH' mean on my EBARA EV-S50P Water Pump?
    • M
      mgonzalezSep 23, 2025
      If your EBARA Water Pump displays 'WARN: PUMP BOX TEMP HIGH', the cooling water flow may be reduced, or the ambient temperature may be high. Increase cooling water flow or confirm the ambient temperature (less than 30?).
  • J
    Jesus SmithAug 25, 2025
    Why is the circuit protector activated on my EBARA Water Pump?
    • B
      bclarkAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.
  • J
    James DiazAug 25, 2025
    What to do if EBARA Water Pump shows ALARM: WATER FLOW LOW?
    • C
      carl39Aug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • A
    Amanda WilsonAug 27, 2025
    Why is my EBARA EV-S50P Water Pump making abnormal noises and vibrating excessively?
    • W
      William PearsonAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • J
    Jennifer ThomasSep 23, 2025
    What does 'WARN:PUMP N2 VALVE ERROR' mean on my EBARA Water Pump?
    • A
      amber54Sep 23, 2025
      If your EBARA Water Pump displays 'WARN:PUMP N2 VALVE ERROR', the N2 valve may be open. Close N2 valve, which is located at the side of the pump.
  • B
    Bruce OrtizSep 13, 2025
    What does 'ALARM : BACK PRESS.HIGH' mean on my EBARA EV-S50P?
    • X
      xcarpenterSep 13, 2025
      If your EBARA Water Pump displays 'ALARM : BACK PRESS.HIGH', the exhaust valve may be closed, there may be accumulation of by-products in pipes, or there may be instruments failure. Check the exhaust pipe or replace the instruments.
  • W
    Wyatt NortonSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S50P?
    • V
      Veronica MillerSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • L
    Lisa RobertsSep 12, 2025
    What to do if my EBARA EV-S50P Water Pump shows 'ALARM: WATER LEAKAGE'?
    • T
      Todd CampbellSep 12, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to loosened tube fittings or instrument failure. Re-tighten the tube fittings or replace the instrument.
  • K
    Kayla CampbellSep 4, 2025
    What to do if my EBARA Water Pump MP does not start when entering external “MP start” signal input?
    • D
      Dr. Linda KeithSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • T
    Taylor GuzmanSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA Water Pump?
    • C
      Collin AustinSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.

Summary

Instruction Manual Overview

General Safety Precautions

Initial cautions for reading and understanding the manual before equipment use.

Safety Information

Hazard Level Designations

Defines terms like DANGER, WARNING, and CAUTION used in the manual.

Important Prior Warnings

Lifting and Electrical Safety

Warnings regarding pump lifting, qualified electricians, and circuit breakers.

Gas Handling and Purging

Safety instructions for handling N2 gas and purging piping.

Safety Warning Labels

Standard Limited Warranty

Product Description

Release and Shut Off Residual Internal Energy

Electrical Power Lockout;Tagout

Procedures for safely disconnecting electrical power for maintenance.

Cooling Water and Nitrogen Shutoff

Steps to shut off and disconnect cooling water and N2 gas supplies.

Installation Guidelines

Piping Connections

Electrical Wiring

Power Supply Wiring

Information on power supply connectors and wiring for different models.

Control Signal Wiring

Details on connecting control signals for remote operation and monitoring.

LCD Controller Operation

Operational Mode Settings

Procedures for setting control, running, and speed modes via LCD.

DIP Switch Settings

Configuration of pump modes and functions using DIP switches.

Pump Operation

Before Starting Procedures

Essential checks and preparations before operating the pump.

Start;Stop Operations

Methods for starting and stopping the pump, including safety notes.

Maintenance and Inspection

Disconnection and Transportation

Toxic Gas Handling and Precautions

Safety measures when handling toxic gases during disconnection.

Slinging and Securing the Pump

Guidance on safe lifting and securing methods for transportation.

SEMI S2 Standard Requirements

Troubleshooting Guide

Basic Troubleshooting

Common issues like circuit protector activation and LCD errors.

Warning Troubleshooting

Solutions for WARNING displays related to water flow, temperature, and communication.

Alarm Troubleshooting

Solutions for ALARM displays like water flow, temperature, motor overload, and phase errors.

EBARA EV-S50P Specifications

General IconGeneral
BrandEBARA
ModelEV-S50P
CategoryWater Pump
LanguageEnglish

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