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EBARA EV-S50P - User Manual

EBARA EV-S50P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • W
    Wyatt NortonSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA EV-S50P?
    • V
      Veronica MillerSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • K
    kgeorgeSep 9, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA Water Pump?
    • J
      jjacobsSep 9, 2025
      If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
  • J
    Justin BrownSep 8, 2025
    What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA EV-S50P Water Pump?
    • V
      Vanessa SummersSep 8, 2025
      If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
  • M
    Mr. Daniel MillerSep 7, 2025
    What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA EV-S50P Water Pump?
    • N
      Natasha ArmstrongSep 7, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • S
    Sarah JimenezAug 23, 2025
    What to do if my EBARA Water Pump shows 'ALARM: EMERGENCY STOP'?
    • J
      John SantosAug 23, 2025
      If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
  • K
    Kenneth SanchezSep 5, 2025
    What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA Water Pump?
    • S
      Sylvia RivasSep 5, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • K
    Kayla CampbellSep 4, 2025
    What to do if my EBARA Water Pump MP does not start when entering external “MP start” signal input?
    • D
      Dr. Linda KeithSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • J
    James MorrisSep 3, 2025
    What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA EV-S50P Water Pump?
    • B
      Bianca GonzalezSep 3, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
  • T
    Taylor GuzmanSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA Water Pump?
    • C
      Collin AustinSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • G
    Gail PaulSep 1, 2025
    What to do if my EBARA EV-S50P Water Pump MP does not start when applying START button?
    • M
      Molly RomanSep 1, 2025
      If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.

Summary

Instruction Manual Overview

General Safety Precautions

Initial cautions for reading and understanding the manual before equipment use.

Safety Information

Hazard Level Designations

Defines terms like DANGER, WARNING, and CAUTION used in the manual.

Important Prior Warnings

Lifting and Electrical Safety

Warnings regarding pump lifting, qualified electricians, and circuit breakers.

Gas Handling and Purging

Safety instructions for handling N2 gas and purging piping.

Safety Warning Labels

Standard Limited Warranty

Product Description

Release and Shut Off Residual Internal Energy

Electrical Power Lockout;Tagout

Procedures for safely disconnecting electrical power for maintenance.

Cooling Water and Nitrogen Shutoff

Steps to shut off and disconnect cooling water and N2 gas supplies.

Installation Guidelines

Piping Connections

Electrical Wiring

Power Supply Wiring

Information on power supply connectors and wiring for different models.

Control Signal Wiring

Details on connecting control signals for remote operation and monitoring.

LCD Controller Operation

Operational Mode Settings

Procedures for setting control, running, and speed modes via LCD.

DIP Switch Settings

Configuration of pump modes and functions using DIP switches.

Pump Operation

Before Starting Procedures

Essential checks and preparations before operating the pump.

Start;Stop Operations

Methods for starting and stopping the pump, including safety notes.

Maintenance and Inspection

Disconnection and Transportation

Toxic Gas Handling and Precautions

Safety measures when handling toxic gases during disconnection.

Slinging and Securing the Pump

Guidance on safe lifting and securing methods for transportation.

SEMI S2 Standard Requirements

Troubleshooting Guide

Basic Troubleshooting

Common issues like circuit protector activation and LCD errors.

Warning Troubleshooting

Solutions for WARNING displays related to water flow, temperature, and communication.

Alarm Troubleshooting

Solutions for ALARM displays like water flow, temperature, motor overload, and phase errors.

EBARA EV-S50P Specifications

General IconGeneral
BrandEBARA
ModelEV-S50P
CategoryWater Pump
LanguageEnglish

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