EasyManua.ls Logo

EBARA EV-S50P - User Manual

EBARA EV-S50P
113 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Loading...
Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • J
    Jerry BerryAug 30, 2025
    What does 'WARN: CASING TEMP HIGH' mean on my EBARA Water Pump?
    • B
      Brent RobertsAug 31, 2025
      If your EBARA Water Pump displays 'WARN: CASING TEMP HIGH', it could be due to a rise in pump back pressure, an increase in the gas load, accumulation of by-product, or reduced cooling water flow. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or increase cooling water flow.
  • T
    Thomas PittsAug 29, 2025
    Why does nothing appear on the LCD of my EBARA EV-S50P Water Pump?
    • J
      John TuckerAug 29, 2025
      If the LCD on your EBARA Water Pump shows nothing, it could be due to several reasons. First, check the power supply to ensure the pump is receiving power. Next, verify that the connector is properly connected. Also, make sure the CP is turned ON. Check the LCD’s connector to ensure that it is connected. If none of these steps resolve the issue, the instrument may have failed and need replacement.
  • D
    donaldvaughnAug 28, 2025
    What causes 'ALARM: CASING TEMP H.HIGH' on my EBARA EV-S50P?
    • I
      isabellamooreAug 28, 2025
      If your EBARA Water Pump displays 'ALARM: CASING TEMP H.HIGH', the pump back pressure may be rising, there may be an increase in the gas load, cooling water flow may be reduced, or there may be an accumulation of by-products. Check the exhaust pipe, reduce the inflow gas amount, cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • A
    Alice MasseyAug 27, 2025
    What does 'WARN: WATER FLOW LOW' mean on my EBARA Water Pump and how do I fix it?
    • M
      mgreenAug 27, 2025
      If the EBARA Water Pump displays 'WARN: WATER FLOW LOW', it could be due to several reasons: * Coupler is disconnected, so connect it. * Pressure is insufficient, so apply sufficient pressure. * Root valve is closed, so open the valve. * Water pipe is clogged, so clean or replace the piping. * Tube fittings are loosened, so re-tighten them. * Instrument failure, so replace the instrument. * Outlet & inlet pipes are reversed, so connect the pipes correctly.
  • A
    Amanda WilsonAug 27, 2025
    Why is my EBARA EV-S50P Water Pump making abnormal noises and vibrating excessively?
    • W
      William PearsonAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • J
    James DiazAug 25, 2025
    What to do if EBARA Water Pump shows ALARM: WATER FLOW LOW?
    • C
      carl39Aug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • J
    Jesus SmithAug 25, 2025
    Why is the circuit protector activated on my EBARA Water Pump?
    • B
      bclarkAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.

Summary

Instruction Manual Overview

General Safety Precautions

Initial cautions for reading and understanding the manual before equipment use.

Safety Information

Hazard Level Designations

Defines terms like DANGER, WARNING, and CAUTION used in the manual.

Important Prior Warnings

Lifting and Electrical Safety

Warnings regarding pump lifting, qualified electricians, and circuit breakers.

Gas Handling and Purging

Safety instructions for handling N2 gas and purging piping.

Safety Warning Labels

Standard Limited Warranty

Product Description

Release and Shut Off Residual Internal Energy

Electrical Power Lockout;Tagout

Procedures for safely disconnecting electrical power for maintenance.

Cooling Water and Nitrogen Shutoff

Steps to shut off and disconnect cooling water and N2 gas supplies.

Installation Guidelines

Piping Connections

Electrical Wiring

Power Supply Wiring

Information on power supply connectors and wiring for different models.

Control Signal Wiring

Details on connecting control signals for remote operation and monitoring.

LCD Controller Operation

Operational Mode Settings

Procedures for setting control, running, and speed modes via LCD.

DIP Switch Settings

Configuration of pump modes and functions using DIP switches.

Pump Operation

Before Starting Procedures

Essential checks and preparations before operating the pump.

Start;Stop Operations

Methods for starting and stopping the pump, including safety notes.

Maintenance and Inspection

Disconnection and Transportation

Toxic Gas Handling and Precautions

Safety measures when handling toxic gases during disconnection.

Slinging and Securing the Pump

Guidance on safe lifting and securing methods for transportation.

SEMI S2 Standard Requirements

Troubleshooting Guide

Basic Troubleshooting

Common issues like circuit protector activation and LCD errors.

Warning Troubleshooting

Solutions for WARNING displays related to water flow, temperature, and communication.

Alarm Troubleshooting

Solutions for ALARM displays like water flow, temperature, motor overload, and phase errors.

EBARA EV-S50P Specifications

General IconGeneral
BrandEBARA
ModelEV-S50P
CategoryWater Pump
LanguageEnglish

Related product manuals