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EBARA EV-S20N - User Manual

EBARA EV-S20N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • J
    Jerry BoydSep 23, 2025
    What does 'WARN: PUMP BOX TEMP HIGH' mean on my EBARA Water Pump?
    • K
      Kelly SchwartzSep 23, 2025
      If your EBARA Water Pump displays 'WARN: PUMP BOX TEMP HIGH', the cooling water flow may be reduced, or the ambient temperature may be high. Increase cooling water flow or confirm the ambient temperature (less than 30?).
  • M
    Megan LopezAug 25, 2025
    Why is the circuit protector activated on my EBARA Water Pump?
    • G
      Grace PachecoAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.
  • A
    ajonesAug 25, 2025
    What to do if EBARA EV-S20N Water Pump shows ALARM: WATER FLOW LOW?
    • A
      Andrew RoseAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • R
    ryandavidAug 26, 2025
    Why is my EBARA EV-S20N Water Pump making abnormal noises and vibrating excessively?
    • W
      Willie PooleAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • T
    Tony Hammond PhDSep 23, 2025
    What does 'WARN:PUMP N2 VALVE ERROR' mean on my EBARA Water Pump?
    • R
      Renee RamirezSep 23, 2025
      If your EBARA Water Pump displays 'WARN:PUMP N2 VALVE ERROR', the N2 valve may be open. Close N2 valve, which is located at the side of the pump.
  • J
    Jennifer WoodsSep 13, 2025
    What does 'ALARM : BACK PRESS.HIGH' mean on my EBARA EV-S20N?
    • O
      otrevinoSep 13, 2025
      If your EBARA Water Pump displays 'ALARM : BACK PRESS.HIGH', the exhaust valve may be closed, there may be accumulation of by-products in pipes, or there may be instruments failure. Check the exhaust pipe or replace the instruments.
  • K
    Kevin CampbellSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA Water Pump?
    • J
      Jacob PrattSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • A
    Alan ShortSep 12, 2025
    What to do if my EBARA Water Pump shows 'ALARM: WATER LEAKAGE'?
    • A
      Amber McculloughSep 12, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to loosened tube fittings or instrument failure. Re-tighten the tube fittings or replace the instrument.
  • M
    Marcus BennettSep 4, 2025
    What to do if my EBARA EV-S20N MP does not start when entering external “MP start” signal input?
    • P
      parsonslarrySep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • S
    Stanley CamachoSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S20N?
    • E
      ebennettSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

Product Description

3.5 Detailed Specifications

Consult tables for pump specification, dimensions, and performance details.

Installation

4.1 Movement and Fixation

Guidance on moving the pump and securing it in place.

LCD Controller

5.3 Setting Operational Mode

How to set pump control, running modes, and parameters via LCD.

5.4 Dip Switch

Settings for selecting operating modes using DIP switches.

Operation

6.1 Before Starting

Steps to take before starting the pump, including water and N2 gas supply.

Maintenance and Inspection

Disconnection and Transportation

SEMI S2 Standard

Troubleshooting

10.1 Basic Trouble

Diagnosing and correcting basic issues like circuit protector activation or no LCD display.

10.2 WARNING Troubleshooting

Resolving WARNING messages related to water flow, temperature, and communication.

10.3 ALARM Troubleshooting

Diagnosing and correcting ALARM conditions like water flow, temperature, and motor issues.

EBARA EV-S20N Specifications

General IconGeneral
ModelEV-S20N
CategoryWater Pump
Power SupplySingle-phase
Voltage220-240V
Frequency50 Hz
MaterialStainless Steel
TypeSubmersible

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