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EBARA EV-S20N - User Manual

EBARA EV-S20N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

Product Description

3.5 Detailed Specifications

Consult tables for pump specification, dimensions, and performance details.

Installation

4.1 Movement and Fixation

Guidance on moving the pump and securing it in place.

LCD Controller

5.3 Setting Operational Mode

How to set pump control, running modes, and parameters via LCD.

5.4 Dip Switch

Settings for selecting operating modes using DIP switches.

Operation

6.1 Before Starting

Steps to take before starting the pump, including water and N2 gas supply.

Maintenance and Inspection

Disconnection and Transportation

SEMI S2 Standard

Troubleshooting

10.1 Basic Trouble

Diagnosing and correcting basic issues like circuit protector activation or no LCD display.

10.2 WARNING Troubleshooting

Resolving WARNING messages related to water flow, temperature, and communication.

10.3 ALARM Troubleshooting

Diagnosing and correcting ALARM conditions like water flow, temperature, and motor issues.

EBARA EV-S20N Specifications

General IconGeneral
ModelEV-S20N
CategoryWater Pump
Power SupplySingle-phase
Voltage220-240V
Frequency50 Hz
MaterialStainless Steel
TypeSubmersible

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