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EBARA EV-S20N - User Manual

EBARA EV-S20N
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • K
    Kevin CampbellSep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA Water Pump?
    • J
      Jacob PrattSep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • T
    Timothy ChavezSep 9, 2025
    What does 'ALARM: PHASE ERROR' mean on my EBARA EV-S20N?
    • C
      courtneymcdonaldSep 9, 2025
      If you're seeing 'ALARM: PHASE ERROR' on your EBARA Water Pump, it could be due to an open phase or incorrect wiring. Replace the instrument or check the power supply.
  • H
    Heather HardySep 8, 2025
    What does 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###' mean on my EBARA EV-S20N Water Pump?
    • M
      Miss Jessica SanchezSep 8, 2025
      If your EBARA Water Pump displays 'ALARM: BP DRIVER ### ALARM: MP DRIVER ###', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, the cooling water flow rate may be reduced or the motor driver has broken down. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, cool the pump thoroughly and reset, or replace the motor driver.
  • B
    Brendan NicholsSep 7, 2025
    What does 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT' mean on my EBARA Water Pump?
    • R
      robertraymondSep 7, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR STEP OUT ALARM:MP MOTOR STEP OUT', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • D
    debratranAug 23, 2025
    What to do if my EBARA EV-S20N Water Pump shows 'ALARM: EMERGENCY STOP'?
    • M
      michelle25Aug 23, 2025
      If the EBARA Water Pump displays 'ALARM: EMERGENCY STOP', it's likely due to the emergency stop switch being activated. Ensure the pump can be operated and turn the button head to release the lock.
  • E
    elijahmunozSep 5, 2025
    What does 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2' mean on my EBARA Water Pump?
    • V
      vchangSep 5, 2025
      If your EBARA Water Pump displays 'ALARM:BP MOTOR OVERLOAD 2 ALARM:MP MOTOR OVERLOAD 2', the pump back pressure may be rising, there may be an increase of the gas load, the rotor may be making contact, or there may be an instrument failure. Check the exhaust pipe & silencer, reduce the inflow gas amount, replace or overhaul the pump, or replace the instrument.
  • M
    Marcus BennettSep 4, 2025
    What to do if my EBARA EV-S20N MP does not start when entering external “MP start” signal input?
    • P
      parsonslarrySep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • T
    Travis WilliamsSep 3, 2025
    What does 'WARN: PUMP N2 FLOW LOW' mean on my EBARA EV-S20N?
    • P
      Pamela ElliottSep 3, 2025
      If your EBARA Water Pump displays 'WARN: PUMP N2 FLOW LOW', it could be due to several reasons: the N2 port is not connected, the primary pressure is insufficient, the regulator setting value is too low, the N2 pipe is clogged or there are leaks on N2 pipe, or there is an instrument failure. Connect the N2 pipe fitting, apply sufficient pressure, increase the pressure setting, replace the N2 piping, check the fittings, or replace the instrument.
  • S
    Stanley CamachoSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA EV-S20N?
    • E
      ebennettSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.
  • C
    Calvin WilsonAug 31, 2025
    What to do if my EBARA Water Pump MP does not start when applying START button?
    • A
      aleczhangSep 1, 2025
      If the MP (Main Pump) on your EBARA Water Pump doesn't start when you press the START button, it might be because “Remote” or “COM” mode has been selected or start-up conditions are not satisfied. Alternatively, there could be an instrument failure. Set the switch to “Local” mode or satisfy all start-up conditions. If the problem persists, replace the instruments.

Summary

Safety Information

Important Prior Warnings

Safety Interlocks

Product Description

3.5 Detailed Specifications

Consult tables for pump specification, dimensions, and performance details.

Installation

4.1 Movement and Fixation

Guidance on moving the pump and securing it in place.

LCD Controller

5.3 Setting Operational Mode

How to set pump control, running modes, and parameters via LCD.

5.4 Dip Switch

Settings for selecting operating modes using DIP switches.

Operation

6.1 Before Starting

Steps to take before starting the pump, including water and N2 gas supply.

Maintenance and Inspection

Disconnection and Transportation

SEMI S2 Standard

Troubleshooting

10.1 Basic Trouble

Diagnosing and correcting basic issues like circuit protector activation or no LCD display.

10.2 WARNING Troubleshooting

Resolving WARNING messages related to water flow, temperature, and communication.

10.3 ALARM Troubleshooting

Diagnosing and correcting ALARM conditions like water flow, temperature, and motor issues.

EBARA EV-S20N Specifications

General IconGeneral
ModelEV-S20N
CategoryWater Pump
Power SupplySingle-phase
Voltage220-240V
Frequency50 Hz
MaterialStainless Steel
TypeSubmersible

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