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EBARA EV-S100P - User Manual

EBARA EV-S100P
113 pages
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

Summary

Safety Information

Hazard Level Definitions

Defines hazard levels (DANGER, WARNING, CAUTION) and notes for safe handling.

Important Prior Warnings

Safety Warning Labels

Hazardous Voltage Warning

Warns about risks of electric shock, burn, or death from hazardous voltage.

Hazardous Materials Warning

Warns about hazardous materials, spontaneous fire, explosion, and poisoning risks.

Safety Interlocks

Control System and Warnings

Residual Energy Release

3.4.1 Electrical Power Lockout;Tagout

Detailed procedure for locking out electrical power to ensure safety during maintenance.

3.4.2 Cooling Water Disconnection

Steps for safely disconnecting and draining the cooling water supply.

3.4.3 Nitrogen (N2) Disconnection

Steps for safely disconnecting the nitrogen gas supply and depressurizing.

Detailed Specifications

3.5.2 Model Specifications (EV-S20)

Presents detailed specifications for EV-S20, EV-S20P, and EV-S20N models.

3.5.2 Model Specifications (EV-S50)

Presents detailed specifications for EV-S50, EV-S50P, and EV-S50N models.

3.5.2 Model Specifications (EV-S100)

Presents detailed specifications for EV-S100, EV-S100P, and EV-S100N models.

3.5.2 Model Specifications (EV-S200)

Presents detailed specifications for EV-S200, EV-S200P, and EV-S200N models.

3.5.4 Performance Curve (EV-S20)

Presents performance curves for EV-S20, EV-S20P, and EV-S20N models.

4. Installation

4.2 Piping Connections

4.3 Electrical Wiring

4.3.1 Power Supply Wiring

Shows connector positions and wiring details for power supply and control signals.

4.3.2 Control Signal Wiring

Details on connecting control wires for remote operation and monitoring.

4.3.3 Emergency Stop Switch Box (Optional)

Explains the function and system flow of the optional Emergency Stop Switch Box.

Safety Interlock and Option Power

4.4 Safety Interlock Connector (EXT.IL)

Details the EXT.IL connector for hard interlock signal output as final safety protection.

5. LCD Controller

5.2 LCD Indication

Details on the information displayed on the LCD controller for pump status.

5.3 Operational Mode Settings

Guide to setting operational modes like control, running, and speed via the LCD controller.

5.4 Dip Switch Settings

6. Operation

6.1 Before Starting Checks

Essential checks before starting the pump, including water and N2 gas supply.

6.2 START;STOP Procedures

Details on starting and stopping the pump via local, remote, and communication interfaces.

7. Maintenance and Inspection

7.4 Lubricating Oil Management

Instructions for checking and supplying lubricating oil to the pump.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Basic Troubleshooting

Common basic troubleshooting steps for pump start-up and operational issues.

10.2 WARNING Troubleshooting

Troubleshooting guide for WARNING messages displayed on the LCD controller.

10.3 ALARM Troubleshooting

Troubleshooting guide for ALARM messages displayed on the LCD controller.

10.4 Optional Troubleshooting

Troubleshooting for optional features and specific alarm conditions.

EBARA EV-S100P Specifications

General IconGeneral
BrandEBARA
ModelEV-S100P
CategoryWater Pump
LanguageEnglish

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