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EBARA EV-S100P - User Manual

EBARA EV-S100P
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Doc.No.EVS_CSN_2_E_Rev.3
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
MODEL
EV-S20
MODEL
EV-S50
MODEL
EV-S100
MODEL
EV-S200
CE / SEMI / NRTL MODEL
200-220V(50/60Hz)
Caution:
Please read and understand this INSTRUCTION MANUAL
thoroughly before using this equipment.
Be sure to keep this INSTRUCION MANUAL on hand for future
reference.
T
o Facility and Tool Manufactures:
Be sure to distribute this INSTRUCTION MANUAL to all end-user
personnel actually operation this equipment.
Model ООО
in this INSTRUCTION MANUAL is our model code.
ISSUED BY PRECISION MACHINERY COMPANY
PM40U
EBARA
CORPORATION

Table of Contents

Questions and Answers

  • J
    Joseph RogersSep 23, 2025
    What does 'WARN: PUMP BOX TEMP HIGH' mean on my EBARA EV-S100P?
    • S
      Samuel AlvarezSep 23, 2025
      If your EBARA Water Pump displays 'WARN: PUMP BOX TEMP HIGH', the cooling water flow may be reduced, or the ambient temperature may be high. Increase cooling water flow or confirm the ambient temperature (less than 30?).
  • S
    Scott BowmanAug 25, 2025
    Why is the circuit protector activated on my EBARA EV-S100P Water Pump?
    • R
      rcolonAug 25, 2025
      If the circuit protector is activated on your EBARA Water Pump, it could be due to incorrect wiring or a short circuit. Check the wiring first. If that's not the problem, the pump may have a short circuit, requiring replacement or overhaul.
  • B
    Bruce EvansAug 25, 2025
    What to do if EBARA EV-S100P Water Pump shows ALARM: WATER FLOW LOW?
    • M
      Mark SheltonAug 26, 2025
      If the EBARA Water Pump displays 'ALARM: WATER FLOW LOW', several issues could be the cause. It might be that the coupler is disconnected, the pressure isn't sufficient, the root valve is closed, the water pipe is clogged, tube fittings are loosened, there's an instrument failure, or the outlet and inlet pipes are reversed. To resolve this: * Connect the coupler if disconnected. * Apply sufficient pressure. * Open the valve if it's closed. * Clean or replace the piping if clogged. * Re-tighten any loose tube fittings. * Replace the instrument if there is an instrument failure. * Connect pipes correctly if they are reversed.
  • L
    Lucas LopezAug 27, 2025
    Why is my EBARA Water Pump making abnormal noises and vibrating excessively?
    • R
      randersenAug 27, 2025
      If your EBARA Water Pump is experiencing abnormal noise and excessive vibration, here are a few possible causes: * The adjustment feet may not be applied, so use them. * Some object might be making contact with the outer cover, so remove it. * The fastening screws of the outer cover may have worked themselves loose, so tighten them. * Parts of the pump may be damaged, requiring you to replace or overhaul the pump.
  • P
    Patrick MorganSep 23, 2025
    What does 'WARN:PUMP N2 VALVE ERROR' mean on my EBARA EV-S100P Water Pump?
    • V
      victoria19Sep 23, 2025
      If your EBARA Water Pump displays 'WARN:PUMP N2 VALVE ERROR', the N2 valve may be open. Close N2 valve, which is located at the side of the pump.
  • M
    Martha MoonSep 13, 2025
    What does 'ALARM : BACK PRESS.HIGH' mean on my EBARA EV-S100P?
    • M
      Megan RosalesSep 13, 2025
      If your EBARA Water Pump displays 'ALARM : BACK PRESS.HIGH', the exhaust valve may be closed, there may be accumulation of by-products in pipes, or there may be instruments failure. Check the exhaust pipe or replace the instruments.
  • E
    Elizabeth HenrySep 12, 2025
    What does 'ALARM:STARTFAIL ALARM/WARN EXIST' mean on my EBARA Water Pump?
    • S
      stephanie96Sep 12, 2025
      If your EBARA Water Pump displays 'ALARM:STARTFAIL ALARM/WARN EXIST', it could be due to starting during WARNING/ALARM status or instrument failure. Make sure that all starting conditions are met or replace the instrument.
  • T
    Tiffany VaughnSep 12, 2025
    What to do if my EBARA EV-S100P shows 'ALARM: WATER LEAKAGE'?
    • M
      Melinda HallSep 12, 2025
      If your EBARA Water Pump displays 'ALARM: WATER LEAKAGE', it could be due to loosened tube fittings or instrument failure. Re-tighten the tube fittings or replace the instrument.
  • W
    wjohnsonSep 4, 2025
    What to do if my EBARA EV-S100P Water Pump MP does not start when entering external “MP start” signal input?
    • E
      elizabethalexanderSep 4, 2025
      If the MP on your EBARA Water Pump doesn't start when entering external “MP start” signal input, it might be because “Local” or “COM” mode has been selected, start-up conditions are not satisfied, or there is an instrument failure. Set the switch to “Remote” or satisfy all start-up conditions. If the problem persists, replace the instruments.
  • J
    Jose WilliamsSep 2, 2025
    What does 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH' mean on my EBARA Water Pump?
    • R
      Ricky CollinsSep 2, 2025
      If the EBARA Water Pump displays 'ALARM:BP MOTOR TEMP H.HIGH ALARM:MP MOTOR TEMP H.HIGH', the cooling water flow may be reduced, or there may be a motor failure. Cool the pump thoroughly and reset it, or replace or overhaul the pump.

Summary

Safety Information

Hazard Level Definitions

Defines hazard levels (DANGER, WARNING, CAUTION) and notes for safe handling.

Important Prior Warnings

Safety Warning Labels

Hazardous Voltage Warning

Warns about risks of electric shock, burn, or death from hazardous voltage.

Hazardous Materials Warning

Warns about hazardous materials, spontaneous fire, explosion, and poisoning risks.

Safety Interlocks

Control System and Warnings

Residual Energy Release

3.4.1 Electrical Power Lockout;Tagout

Detailed procedure for locking out electrical power to ensure safety during maintenance.

3.4.2 Cooling Water Disconnection

Steps for safely disconnecting and draining the cooling water supply.

3.4.3 Nitrogen (N2) Disconnection

Steps for safely disconnecting the nitrogen gas supply and depressurizing.

Detailed Specifications

3.5.2 Model Specifications (EV-S20)

Presents detailed specifications for EV-S20, EV-S20P, and EV-S20N models.

3.5.2 Model Specifications (EV-S50)

Presents detailed specifications for EV-S50, EV-S50P, and EV-S50N models.

3.5.2 Model Specifications (EV-S100)

Presents detailed specifications for EV-S100, EV-S100P, and EV-S100N models.

3.5.2 Model Specifications (EV-S200)

Presents detailed specifications for EV-S200, EV-S200P, and EV-S200N models.

3.5.4 Performance Curve (EV-S20)

Presents performance curves for EV-S20, EV-S20P, and EV-S20N models.

4. Installation

4.2 Piping Connections

4.3 Electrical Wiring

4.3.1 Power Supply Wiring

Shows connector positions and wiring details for power supply and control signals.

4.3.2 Control Signal Wiring

Details on connecting control wires for remote operation and monitoring.

4.3.3 Emergency Stop Switch Box (Optional)

Explains the function and system flow of the optional Emergency Stop Switch Box.

Safety Interlock and Option Power

4.4 Safety Interlock Connector (EXT.IL)

Details the EXT.IL connector for hard interlock signal output as final safety protection.

5. LCD Controller

5.2 LCD Indication

Details on the information displayed on the LCD controller for pump status.

5.3 Operational Mode Settings

Guide to setting operational modes like control, running, and speed via the LCD controller.

5.4 Dip Switch Settings

6. Operation

6.1 Before Starting Checks

Essential checks before starting the pump, including water and N2 gas supply.

6.2 START;STOP Procedures

Details on starting and stopping the pump via local, remote, and communication interfaces.

7. Maintenance and Inspection

7.4 Lubricating Oil Management

Instructions for checking and supplying lubricating oil to the pump.

8. Disconnection and Transportation

10. Troubleshooting

10.1 Basic Troubleshooting

Common basic troubleshooting steps for pump start-up and operational issues.

10.2 WARNING Troubleshooting

Troubleshooting guide for WARNING messages displayed on the LCD controller.

10.3 ALARM Troubleshooting

Troubleshooting guide for ALARM messages displayed on the LCD controller.

10.4 Optional Troubleshooting

Troubleshooting for optional features and specific alarm conditions.

EBARA EV-S100P Specifications

General IconGeneral
BrandEBARA
ModelEV-S100P
CategoryWater Pump
LanguageEnglish

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